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(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

8 RLQ MLU ML1C DB At the time of shipment -X @7 20Data Retraction locking C M(D)LUB25 Component Parts Description Material Note Description Material Note No. q w e r t y u i o !0 !1 !2 No. !5 !6 !7 !8 !

Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port. The pressure difference generated at this time lets the check valve open y and the residual pressure on the A port side is quickly exhausted from R port.

TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

exhaust center Closed center Exhaust center Silencer (AN101-01) Component Parts No.

Response t me 1.Zns ' Shock resistance 300 m/s'(reed swrtch) 1000 m/s'(solid state s',vitch) Flange & Auto Switch Mounting Brqcket Weights NCDRBIOWI0.15.20.30 Rotation Time Setting Fitting Loeation And. Rotation Of Auto Switch luto Swilch 9(r, 160' Ewn a small torque generated by the rotary actuator. due to inertia, can cause qamage.

3(R) NC 1(P) Switch mark (Mounting hole) 2-5.2 (R port) Rc 1/4, 3/8 47 41.6 69 68 29.5 28.5 22.5 13.5 (P port) Rc 1/4, 3/8 Rc 1/4, 3/8 A B Base mounted: VPA544V(A port) 13.5 91.4 57 47 13.5 (PA port) Rc 1/8 NO 2(A) 32 42 52 PA 3(R) NC 1(P) Switch mark Rc 1/4, 3/8 47 2-5.2 (Mounting hole) (R port) 41.6 69 68 29.5 28.5 22.5 13.5 Rc 1/4, 3/8 (P port) 5-5-18 7 3 Port Air Operated Valve Series

, 700), 800, (900), 1000 (300), 500, (600,700), 800, (900), 1000, (1200, 1500, 1800, 2000) (kg) 2) 1 2 (mm/s) 2) 482000 482000 (mm/s 2) 3,000 (mm) 0.1 (mm) 48 48 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 W 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 78 69 (W) 5) 4 5 (W) 6) 87 120 7) (N) 4 19 (W) 8) 3.6 5 (V) DC2410% LEFB16A LEFB25A (mm) (300) 500 (600)(700) 800 (900)1000 (300)

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Response t me 1.Zns ' Shock resistance 300 m/s'(reed swrtch) 1000 m/s'(solid state s',vitch) Flange & Auto Switch Mounting Brqcket Weights NCDRBIOWI0.15.20.30 Rotation Time Setting Fitting Loeation And. Rotation Of Auto Switch luto Swilch 9(r, 160' Ewn a small torque generated by the rotary actuator. due to inertia, can cause qamage.

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.