•

L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc D

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

IR1000/2000/3000

L bracket (3 + 5) 7 Spacer with T bracket (4 + 5) AF2000 AF3000 AF4000 AFM2000 AFM3000 AFM4000 B210L B310L B410L B210T B310T B410T Y20 Y30 Y40 Y20L Y30L Y40L Y20T Y30T Y40T 5 Spacer Approx. 133 Approx. 172 97.5 3 L bracket 4 T bracket 135 1 AF2000 IR1000 2 AFM2000 178 1 AF3000 IR2000 2 AFM3000 234 1 AF4000 IR3000 2 AFM4000 Accessories (Optional)/Part Nos.

Precision Regulator Series IR1000/2000/3000

T Stations Accessory (Pressure gauge) For high/low temperature environments 2 2 stations Nil None ... ... IR1000: G33--01 IR2000: G43--01 T L For high temperature For low temperature G 8 8 stations Body size Accessory (pressure gauge) is included, (but not assembled).

3

Auto switch u The detection position can be changed under the conditions in step t.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

8 w $4 t e $2 !5 $3 y!7 @8 !4 !

1

30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1 C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

OMR0032

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

Electric Grippers

4 q u w e r t !7 Component Parts No.

KB

35.0 17.8 28.5 33.8 57.1 T Rc Rc 1 2 VMG 15-2-115 Series KB 3 Other Piping Material Nipple: KBN Weight (g) D L A Model KBN1 KBN2 KBN3 KBN4 2.9 4.6 7.2 10.2 16.8 21.0 28.6 30.4 14.0 15.0 16.5 17.0 35.0 39.0 41.5 Elbow Different Diameter Female Connector Module: KBD Weight (g) 18.0 28.9 59.5 D1 D2 D3 L1 L2 L3 L4 A1 A2 Model KBD2-1 KBD3-2 KBD4-3 15.2 20.9 26.5 17.6 25.2 32.3 21.0 28.6 30.4

Air Slide Table/Long Stroke Type Series MXY

MXY6 MXY8 MXY12 Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25

MXS

3 t !

Mechanically Jointed Rodless Cylinders

7 i e t !0 q y @2 @3 !3 @4 r !8 !6 o !1 !

KB

Bulkhead female connector: KBE T Connectiong thread Tube O.D. Weight (g) H2 (Hex.) H1 (Hex.) D L A2 A1 M Part No.

Series KC Self-seal Fittings

T Attach thread Weight (g) H1 (Hex.) H2 (Hex.) A1 M A2 D L Part No.

Step Motor Controller (Servo / 24 VDC)

Example) Step data of the controller setting kit [Normal mode] Speed Position Accel Decel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn No.

Precision Regulator

OUTPUT PRESS. 0.01 0.01 0.01 0.01 0.8MPa 0.8MPa 0.8MPa 0.8MPa Max. supply pressure Set pressure range Input pressure G G G G T T T To o o o MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no. Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5.