Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Tentative determination of L type (W + WB) E = () 2 2 V 1000 Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps Consider made-to-order products, depending on an operating condition. P Ps Tentative determination of L type (For intermediate stops, refer to page 8-15-29.) (Refer to page 8-31-1.)

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

41.2 1/8 NPTF P(SUP) port 46.5 L type plug connector (L) M type plug connector (M) (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

CL

+ Stroke 2-Rc P With rod boot EB EA D e 4-LD Width across flats B1 l ZZ + l + Stroke h + l LS + Stroke ZZ + Stroke Width across flats KA Long Stroke When stroke exceeds 1001 mm, mount tie-rod support ring.

Best Pneumatics Vol. 14

Unit Series AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) F.R.L.

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

MGP

l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100 200 0.2 0.3 0.4 0.5 P=0.5MPa 80 100 63 0.1 10 100 50 50 200 20 30 40 50 40 Eccentric distance l (mm) Load weight m (kg) 40 30 32 20 Over 125 stroke 20 25 P=0.5MPa 10 20 25 10 4 5 20 16 Load weight m (kg) 2 3 4 5 3 16 12

IDG

Inlet air pressure [MPa] Inlet air temperature [ C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] [Example] Outlet air flow rate 150 [l/min (ANR)] Outlet air dew point 15 [ C] Inlet air pressure 0.5 [MPa] Inlet air temperature 35 [ C] Allowable pressure drop 0.03 [MPa] Compressed air supply capacity 300 [l/min (ANR)] Dew Point Temperature Conversion Chart

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

100

[kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19 *4 ZL3H, ZL6H (Standard supply pressure: 0.5 MPa) *5 Branch + Port exhaust *6 Basic type ZL6 93*4 600*5 270*4 470 p. 19 ZL1/ZL3/ZL6 Series CAT.ES100-108B A Multistage Ejector ZL1/ZL3/ZL6 Series Energy saving Suction: 100 L Suction: 300 L Suction

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

CJ2

Bore l Part No.