MLGP

Less V = 400 mm/s (24) Over 50 Stroke V = 400 mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) 9-11-14 14 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting (Slide bearing) MLGPM20 to 100 (25) l2 = 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100

MY1

M1 = F1 x L1 F1 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) L2 L1 L3 Maximum Load Weight MY1B/m1 MY1B/m2 MY1B/m3 Select the load from within the range of limits shown in the graphs.

Made to Order

Nil S n 2 pcs. 1 pc. n pcs.

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

XM, XY

The number of adjustment nut (its pitch is 1 mm) rotations and initial exhaust conductance should be confirmed referring to the figure on the right. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount. c Opening of the main exhaust valve (valve

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads Rc/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Speed Controller with

D1 Y L1 M1 M1 Applicable tubing O.D.: 3.2, 4, 6 1/8", 5/32" Metric Size Model Applicable tubing O.D.d D1 Release button D2 D3 D4 D5 L1 L2 L3 L41 L5 L6 L7 L8 M1 Weight [g] X(X) Y Max.

Compact

L3: Overhang Allowable range: 30 mm L3: Overhang Allowable range: 30 mm Allowable overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] MXZ20 MXZ25 3.5 6.0 V = mm/s V = mm/s 3.0 5.0 Load weight m [kg] Load weight m [kg] 2.5 4.0 2.0 3.0 1.5 V = 50 2.0 V = 50 1.0 V = 100 V = 100 V = 200 V = 200 V = 500 V = 500 1.0 0.5 0.0 0.0 45 40 35 30 25 20 10 15 0 5 0 20 10 30 40 50 60 L3: Overhang Allowable

7

S CAC408 50 50A Flange R 230 VAC G N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

MXW

Mey: Find the equivalent weight for impact, We Bumper coefficient = 4/100 (With urethane bumper) Mey We W L2 + B Meymax value is from Graph (2) at V = 1.4 Va = 420 mm/s. Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.

MXW Series Long Stroke Slide Table

} L3=50 {mm} L2=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Short Stroke Electric Actuator Series LX

Speed (mm/s) 40 40 2.6 1.3 0.3 0.1 2.6 1.3 0.3 0.1 80 80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7

Transfer

Pitch moment Yaw moment : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) m : Load mass (kg) F : Load (N) FE : Load equivalent to impact (at impact with stopper) (N) a : Average speed (mm/s) M : Static moment (Nm) M1e = We x L3 x 1 3 M3e = We x L2 x 1 3 M1e M3e We We L3 At collision: = 1.4a a L2