M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.
E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.
L Molded cover 2 x M2.6 x 0.45 16 44 8 (2.4) Connector DB-25SF-N Japan Aviation Electronics Industry, Ltd.
Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/
0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal
N SUP gEllery block disc: AXT634-10A ExH gallery block disc: Axf634-11A d N l --Jh tml o.r7 u j ltllill (4.2)i-l...0.86(2r.8) .o.t7* " "<0?
) port B B1 G G 2 x M thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K
Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from
Plate mounting style with auto switch: CDPXW S M Table (3) L Housing mounting style with auto switch: CDBXW M M Table (4) L Table (3) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch (3) Component parts Material M L CDPXW 16SM L CDPXW 20SM L CDPXW 25SM L CDPXW 32SM L CDPXW
Plate mounting style with auto switch: CDPXW S M Table (3) L Housing mounting style with auto switch: CDBXW M M Table (4) L Table (3) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch (3) Component parts Material M L CDPXW 16SM L CDPXW 20SM L CDPXW 25SM L CDPXW 32SM L CDPXW
Z I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0
MM D EA E AL A K F VA BN S + Stroke CX CT N N U L RR H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZZ + Stroke Z + Stroke (For NPT port) CL T 2-MA Thread effective depth R GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke Bore size
When the temp. set in this item is reached, the alarm [ERR13] arises. 8-7 Operation 8.6.2 Setting mode, Level 2 F i n e C o n t r o l o f I n t e r n a l S e n s o r M O D E < 0 . 0 7 C 1. Fine Control of Internal Sensor Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Fine adjusting value for internal temp.
Rc(PT) 1/4 Unlocking port (unlocked when pressurized) GC BB BA Plug with breathing hole Width across flats KA 2-Rc(PT) P M GA GA MM CD hole H10 Shaft d9 BZ GB 4-J 90 D 59 30 W 14 AL CX 5 A K CT N N U 43 C L S + Stroke H BY B RR Z + Stroke ZZ + Stroke With rod boot 75 l 15 40 h + l Z1 + l + Stroke ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BY BZ C CDH10
"n" pcs. Nil S n Bearing type Slide bearing Ball bushing M L Auto switch type Mounting type Without auto switch (built-in cylinder magnet) Basic Front mounting flange Nil B F Refer to the table below for auto switch models.
Silencer (Air discharge port) Manual override switch (Station 1) (Station n) Light/surge voltage suppressor 5.9 SOL.a: Orange SOL.b: Green ( ) Locking type manual override: 40.5 (45.9) 40 OFF ON OFF ON 32.1 7.5 (When equipped with switch) Switch Note) For manifold dimensions including elbow fitting, refer to page 24. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18
BC element M GA Rc(PT) BP GB G G FA Unlocking port 2-Rc(PT) P Cylinder port Width across flats KA MM D EA E VA AL CX CZ CT N N U A K F BN L RR S + Stroke H ZZ + Stroke Z + Stroke 2-MA Effective thread depth R CL T GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX CZ D E EA F FA 125 140
T h e r e i s n o p a r t i c u l a r p r o b l e m i n u s i n g t h e s y s t e m . R e a d t h e i n s t r u c t i o n m a n u a l W i l l y o u d o a t h o r o u g h l y f o r t h i s i t e m a n d c o u n t e r p o s i t i o n i n g m o t i o n ?
L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type.