Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

SFOD-OMT0009CN

(CIR-R)(CIR-L) 2 34 2 (Y ) (X2, Y2) CIRR CIRL (Xc, Yc) 1) 1) (X1,Y1) 1 (X ) 1)0.71.1 X Y Y (Xa,Ya) (Xc, Yc) X (0,0) 67 No.SFOD-OMT0009CN-B 3.6 CIR-R/L CIR-R/L 1-2 ABS 1)2 2) 3)(0,0) 68 No.SFOD-OMT0009CN-B ) 100mm/s 1 30mm 2 10mm No.1 100mm/s 1 0mm 2 40mm No.2 1 0mm2 20mm 100mm/s No.3 1 0mm2 0mm Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 30.00 1000 1000

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Series KG Stainless Steel One-touch Fittings

L M Effective orifice(mm 2) Applicable tube O.D.

Heavy Duty Stopper Cylinder

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

VQ5000

Note 3) Available only with F , L and T1 kits. Note 4) Specify the wiring specifications on the manifold specification sheet. (Except L kit) . . . . . . Minimum number of stations depends on the kit. (Refer to the table below.)

Sine Rodless Cylinder Series REBR Direct Mount Type

L Y59AL 5m .

Compact Hydraulic Cylinder

Modify the detecting position while the auto switch is secured at the position of (3) in the figure. a Auto switch mounting screw M3 x 0.5 x 8 L (For BQ-1) Auto switch Set screw (Unused) r u t c e y Auto switch mounting bracket d Auto switch mounting screw M2.5 x 0.45 x 6 L b Square nut (For BQ-1) w Cylinder q BQ-1 and BMU1-025 are a set of a and b shown above.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min) 10.0 L/min (5 L/min) 0.1 L/min PF2M710(-L) 0.5 L/min 10.5 L/min (5.25 L/min) 0.5 L/min 10.5 L/min (5.25 L/min) 0.3 L/min 25.0 L/min (12.5 L/min) PF2M725(-L) 1.3 L/min 26.3 L/min (13.1 L/min) 26.3 L/min (13.1 L/min) 1.3 L/min 50.0 L/min (25 L/min) 0.5 L/min PF2M750(-L) 52.5 L/min (26.3 L/min) 2.5 L/min 52.5 L/min (26.3 L/min) 2.5 L/min 100.0 L/min (50 L/min) 1.0 L/min PF2M711(-L) 5.0

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 14 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 NDH10 U1 NX R1 Part no. +0.048 0 Y-J010SUS 3.3 3.2 8 10 +0.048 0 Y-J016SUS 5 6.5 12 10 Rod end cap T-bracket

IDG

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series Series Series Outlet air flow rate Note) Outlet air flow rate Note) Outlet air flow rate Note) (l /min (ANR)) Outlet air flow rate Note) (l /min (ANR)) Series (l /min (ANR)) (l /min (ANR)) IDG1 IDG3 IDG5 IDG10

SX

AXT100-DS25015 030 050 L Terminal no.

LEC-OM02704CN

S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

CXS

L A93L 5m .

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle q w e r Electroless nickel plated Electroless nickel plated Electroless nickel plated, M5 type only y Needle guide Brass t M5 type U10/32 type M5 type U10/32 type Seat ring Lock nut U seal Electroless nickel plated Electroless nickel plated (3) Brass Brass (2) y u i HNBR o !

Pneumatic Transfer System Series MF

Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310

HEC_W-E

External sensor sampling cycle setting mode E x t e r n a l S e n s o r S a m p l i n g C y c l e M O D E < 1 8 0 s e c Setting range: 10 to 999sec Min. increment: 1sec Indicated content: External sensor sampling cycle (Ex.: 180sec) Function: Sets sampling cycle of external sensor for learning control or external tune control. 8-6 Operation 5.