CNG

19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20

Cylinder with Lock Series CNG

19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20

VCL

N C37 Class B Class H Class B Class H SUS FKM Valve type N.C.

Series VCL

N C37 Class B Class H Class B Class H Stainless steel FKM Valve type N.C.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model b (h9) h (h9) l ***!

Table of Contents

Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model b (h9) h (h9) l ***!

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Compact Manifold Regulator

H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

MQQ

Metal Seal Accessory Dimensions Rod end nut Mounting nut d d C C B H B H Material: Carbon steel Material: Carbon steel Applicable bore size (mm) Part no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

New

G 1F 48 VAC G H K L Z NPT 1G 1H 1V 1J 220 VAC 240 VAC DIN terminal ? ? ? ?

RHC

H B B Material: Carbon steel Material: Carbon steel B Part no.

CNG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0.05 E 0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long

HRX-OM-X084

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

HRX-OM-W002

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

Series KP/KPQ/KPG

D2 A L2 D1 H Connection threads 10 For Drive System Air Piping Series KPQ/KPG Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Run Tee: KPQY, KPGY (M5) (M5) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Note1) Weight g L2 D2 M L1 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08

Series KP/KPQ/KPG

D2 A L2 D1 H Connection threads 10 For Drive System Air Piping Series KPQ/KPG Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Run Tee: KPQY, KPGY (M5) (M5) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Note1) Weight g L2 D2 M L1 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08