High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

5 Port Air Operated Valve

) 1/8 (Pilot port: Upward) 4 A A 4 (1.6) 6 45.5 (6) 40.5 55.5 (13.4) (13.4) 1/8 [Pilot port: Lateral (-P)] (Distance between ports) (Distance between ports) 1/8 [Pilot port: Lateral (-P)] 3EB EB 3 14.5 (5.5) 6 6 14.5 (45) (55) 36 36 35 17.5 17.5 5 EA EA 5 12 M5 x 0.8 [5 (EA), 3 (EB) port] 11.8 12 (16) M5 x 0.8 [5 (EA), 3 (EB) port] (40) (26) 2 x 4.5 (For mounting) (50) 2 x 5.5 (For mounting

Table of Contents

6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Precision Regulator

6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

PF2A/PF2W

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

RQ

YA-03 Joint. YU-03 Joint Part No.

Digital Flow Switches, Series PF2A, Series PF2W

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

IR1000/2000/3000

Port size None With bracket With pressure gauge Nil B Application size Symbol IR1000 IR2000 IR3000 Option G 01 02 03 04 1/8 1/4 3/8 1/2 For series IR3000 0 1 2 0.01 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Note) Air operated type is model IR3120 only. 14-5-6 6 Precision Regulator Series IR1000/2000/3000 Specification Combinations : Standard specifications : Combination possible : Combination

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

125

size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage VEX312 VEX332 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer Electrical entry

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve Series SYJA3000

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series IDG

and 50HM are 03 only.