energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VJ300-5-2 A P Manifold gasket VJ300-5-1 Manifold gasket VJ300-5-2 Applicable base SS3YJ3-20 SS3YJ3-20R Applicable base Sub-plate SS3YJ3-41 SS3YJ3-S41 SS3YJ3-42 SS3YJ3-S42 SS3YJ3-42R SS3YJ3-S42R Applicable base SS3YJ3-20 SS3YJ3-20R Applicable base Sub-plate SS3YJ3-41 SS3YJ3-S41 SS3YJ3-42 SS3YJ3-S42 SS3YJ3-42R SS3YJ3-S42R Manifold base Manifold base Manifold base Manifold base 2.2-12 Series

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 (Z) 20 (20) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 5 7 8.5 (mm) 7 2-5.1 Z ZZ SS S Model CXSW10-10 CXSW10-20 CXSW10-30 CXSW10-40 CXSW10-50 CXSW10-75 CXSW10-100 CXSW10-125 CXSW10-150 30 30 92 136 52 10 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) Standard stroke Long stroke (-XB11) 102 20 156 62 112 176 30 72 (Z) 122 196 82 40 4-M3 x 0.5 thread depth 5 4 (20

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

A A 20 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" A A 5 5 (Pitch) P=10.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 15.5 Station L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220

0.4

7 (14) 11 (20) D side 2 6 6 (12) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

HRX-OM-X037

screen . 5-16 Alarm reset . 5-17 Alarm name . 5-17 Alarm log record . 5-18 Display of alarm/maintenance reminder . 5-19 5.4.5 Check operation time screen and maintenance reminder . 5-20 HRL Series HRX-OM-X037 Contents Setting the usage time of DI filter.5-22 Setting of the usage time of dustproof filter (Only for air-cooled type) .5-22 5.4.6 Software version screen .5-23 5.4.7 CH1 setting

CNG

32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300

Intrinsically Safe Valve

5 Double solenoid 53-SY5220-LL3-01 (2 sets) Example Cylinder port size Single solenoid 53-SY5120-LL3-01 (2 sets) 01: 1/8" Blanking plate assembly SY5000-26-20A (1 set) Manifold series 5 7 53-SY5000 Manifold base (5 stations) 53-SS5Y5-20-05 53-SY7000 Stations Stations 3 2 1 02 2 stations 20 20 stations 53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Table of Contents

Contents 10 16 20 25 32 CU10D-PS CU16D-PS CU20D-PS CU25D-PS CU32D-PS Set of nos. above !4, !5, !6 Seal kit includes !4, !5, !6.

MQQ

dimensions, refer to basic style on page 10-5-20.

MQQ

, refer to basic style on page 10-5-20.

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

= 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (5) V = 1000 mm/s 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20 0.6 5 10 20 30 40 50 100 Overhang l (mm) 8-28-16 16 Model Selection Series CXS Horizontal Mounting Graph (6) V = Up to 800 mm/s; Up to

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.

MXS Series Air Slide Table

3.5 deep 4 0.5 1 (With stroke adjuster at extension end) 12 32 24 18 9.5 F 10 3H9 2.5 deep +0.025 0 N -1 x F 2-M3 x 0.5 thread 5 deep 2 11 3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2