JIS Standard Hydraulic Cylinder

3 @3 r @5 !

Vacuum Pad

6 1.48 to 1.84 (2.0 to 2.5) 0.045 (0.2) 0.11 (0.5) 3, 6, 10 15, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

HRX-OM-W060

Sound noise:HRL100-A-20 : 75 dB(A) HRL200-A-20 : 75 dB(A) HRL300-A-20 : 71 dB(A) * Front 1m, height 1m, rated condition 3.2 Installation HRL Series 3-6 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.2.3 Installation and maintenance space It is recommended to keep the space around the product shown in Fig. 3-3.

MXS Series Air Slide Table

deep +0.025 0 N -1 x F 2 +0.025 0 3H9 3 deep 12 6 M 0.5 22 24 Z ZZ (NN-1) x H G H 13 6.5 6.5 13 A B 3.2 6.5 7 7 15 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 3 deep +0.025 0 3H9 3 deep +0.025 0 HA GA Cross section AA Cross section BB (mm) Model F 25 25 40 50 38 50 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Tie-rod Type Hydraulic Cylinder

60 17.5 32 44 18 22 1/4 30 15 106 37 50 19 50 14 9 23 20 28 17 13 M10 x 1.5 M16 x 1.5 25 22 73 17 35 53 20 26 3/8 30 18 112 43 63 21 55 16 8 27 22.4 30 17 13 M10 x 1.5 M18 x 1.5 28 25 80 17 40 60 22 26 3/8 30 20 116 47 80 26 65 M12 x 1.75 18 8 31 28 32 22 15 M22 x 1.5 32 29 100 20 45 75 26 30 1/2 35 22 127 57 100 34 80 M27 x 2 M12 x 1.75 20 6.5 35 35.5 35 27 16 38 34 118 19 50 90 27 32 1

HRX-OM-R016

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-R016 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-W038

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Recommended earth leakage breaker Model Power supply Sensitivity voltage Cable qty. x size Rated Rated of leak voltage current current [V] [A] [mA] 1-phase 200-230V AC (50/60Hz) 3 cores x12AWG HRS040-A-20 200, Recomm 230 20 30 Terminal (3 cores x3.5mm2) HRS040-W-20 block ended (including ground) screw crimp diameter terminal

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

Thermo-chiller/Rack Mount Type

3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to page 646 for dimensions with connector cable. 618 3 Port Pilot Solenoid Valve 10-SYJ500 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): 10-SYJ54MG H -01 1/8 (A port) 18 8.5 2 x 4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor

Intrinsically Safe Valve

Manifold base (5 stations) 53-SS5Y5-20-05 53-SY7000 Stations Stations 3 2 1 02 2 stations 20 20 stations 53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

CNG

(136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68 84 16.5 10 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 182 (190) H e f h ZZ 30 19 55 202 (210) 35 Stroke x 197.5 (205.5) 30 20 62 219.5 (227.5) 40 200.5 (208.5) 35 20 62 222.5 (230.5) 40 226 (235) 35 20 70

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug