Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) 24 M4 x 0.7, thread depth 8 (F.G. terminal) Auto switch groove (1 row per side) 6.5 38.5 48 6 B D x 120 (= E) 10 120 F 3H9 (+0.025 0 ) depth 35 Motor mounting position: Right side parallel Motor mounting position: Left side parallel 106 4 106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting reference plane, set

Compact 5-Port Solenoid Valve

.: 8 (SMC) (Pitch) P=6.5 48 10.2 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring * These figures show the JJ5SY1-10F2-05D-C4. * Refer to page 97 for dimensions of external pilot (Made to Order) and silencer. * When CM is selected for mixed A, B port size and C6 (9 mm pitch) is included, refer to page 100 for dimensions. n: Stations L: Dimensions n L 2

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

16.9 C6: 33.6 N7: 37.4 16.9 C6: 33.6 N7: 37.4 (3.2) 16.9 (3.2) (3.2) C6: 33.6 N7: 37.4 Note) Refer to page 176 for dimensions of connector types. 48 Body Ported 10-SY3000/5000/7000/9000 [ ]: AC Dimensions: Series 10-SY5000 2 position single Grommet (G), (H): 10-SY5120(-F2) G H C4, N3 C6, N7 C8, N9 Foot bracket 10-SY5120-F1 G H C4, N3 C6, N7 C8, N9 47 38 2 x M3 x 0.5, thread depth 4 (For

PF-OMN0009_C

28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/521()

3

46 51.5 U 35.5 38 43 48 20 25 32 40 50 63 398 Auto Switch Mounting MK Series Auto Switch Mounting Bracket/Parts No.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

VQ5000

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 B 2 A 4 Indicator light 5 B 2 A 4 A 4 SMC SMC SMC SMC A A B B B B B Manual override L2 L1 58.5 P = 41 B 2 A 4 A B 3 B 2 A 4 A B 2 A 34.5 48

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

VM

Roller lever Roller lever One way roller lever Straight plunger Roller plunger Cross roller plunger Adjustable roller lever Toggle lever Push button (Mushroom) Push button (Extended) Push button (Flush) Twist selector (2 position) Adjustable rod lever Key selector (2 position) Twist selector (3 position) Foot pedal Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48

80

Resin (PPS) With bracket 1.6 4 One-touch fitting 2.3 48 VAC 3.2 220 VAC Special voltage 1.6 240 VAC Single unit N.C.

VXD21/22/23

VN Solenoid valve option Nil Standard Rated voltage 1 2 3 4 5 6 7 8 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-9 by Applicable Fluids Check List for special fluids outside of the standard.

VXP21/22/23

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard.

VXZ

LQ K P 88 97 108.5 113.5 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 60 60 62 62 48 48 50 50 72 80 95 100 LVN TI/ TIL PA Conduit terminal: T N.C.Normally closed N.O.Normally open PAX PB Model N N.C. N.O. N.C. N.O.

SY

Dimension L 44 45 46 47 48 49 50 51 52 53 54 No. 648 660.5 673 685.5 698 710.5 723 735.5 748 760.5 773 Connector manufacturer examples Hirose Electric Company Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 Built-in silencer P.1.10-48 P.1.10-52 C C6 (6) C8 (8) C8 (8) kit N7 (1/4) N9 (5/16) N9 (5/16) Built-in silencer P.1.10-48 P.1.10-52 C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) Built-in silencer P.1.10-80 P.1.10-82 1.10-5 Cylinder Speed Chart Series VQ0 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in Screw-in Screw-in 05 07 0.5 mm 0.7 mm 06 08 10 12 16 01 02 03 04 6 8 10 12 16 Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 88 kPa 48

Basic Type/Direct Mount Type

44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

39

12 13.7 95 166 95.5 12 376.6 155.5 78.4 M8 x 1.25 19 8 110 54 15 16.6 99 171.5 100.5 12 391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA 104.5 50 63 45 45 5 40 46 88 20 20 46 48 78.4 138.5 134 92 55 45 10 55 52 104 25 25 52 54 78 151 146.5 6 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Dimensions Model Selection CKZ3N North American Type

Power Clamp Cylinder

16 220.1 150.2 50 How to Order Right type CKZT50 A015 C S 44 34 Arm position 48 68 C R L Center Right Left 20 Center type Left type Mounting hole 2 x D1H7 through Symbol D1 6 8 D2 9 10.2 2 x D2 through S B (9) 300.2 300.02 1050.1 Weight kg (lbs) CKZT50-A015CS CKZT50-A015CB CKZT50-A015RS CKZT50-A015RB CKZT50-A015LS CKZT50-A015LB 0.79 (1.74) 0.78 (1.72) 0.90 (1.98) 0.89 (1.96) 0.90 (1.98)

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.