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[ Kit Requires for S kit SOO'.

Vacuum System Peripherals:

For AC, there is no S specifications, since it is integral with converter. Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

Magnetically Coupled Rodless Cylinder

+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x

39

90 105 120 135 15 30 G 45 NPT 60 Rc 75 90 105 120 135 A015 C S CKZT Arm 63 Power clamp cylinder European type Mounting hole D1 D2 Symbol S B 6 9 Bore size 8 10.2 50 63 50 Equivalent 63 Equivalent Arm mounting position Center Offset A015 A045 D1 D2 Offset 15 C Offset 45 Right D1 D2 Arm mounted R Left L D1 D2 13 Series CKZ3T Cylinder Specifications Bore size 50 Equivalent 63 Equivalent Action

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

IDG

60 75 100 Nil None (Standard) P With fitting for purge air discharge 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.

JXCx-OMT0005CN

(OUT05)OFF M 11INPOFF 12BUSYON ... *1 13DRIVEOFF 0mm 50mm 60mm 100mm 5 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm *1 SVRE SETONON 51 - 13.2 )100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) [] 1 2 No. mm/s mm 2 2 mm/s mm mm mm mm/s mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) 2DRIVEON

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

MTS

Selection conditions Mounting: Horizontal Maximum speed: 600 mm/s Stroke: 125 mm Overhang: 80 mm Load weight: 0.7 kg Mounting: Vertical Maximum speed: 800 mm/s Overhang: 50 mm Load weight: 2 kg Refer to graph (7) based on vertical mounting and the maximum speed of 800 mm/s. On graph (7), find the intersecting point for the overhang of 50 mm and the load weight of 2 kg to determine 32.

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Note 1) Perpendicular electrical entry is not available for 50 and 63.

MU

66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUWF25 MUWF32 MUWF40 MUWF50 MUWF63 2.4-9 Plate Cylinder/Single Acting Spring Return/Extend Series MU 25, 32, 40, 50, 63 How to Order Standard MU B 25 10 S M MDU B 25 10 S M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange

Series AK1000

(psig) 35 0.24 70 0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections

RZQ

CE2 50 631 41 355.5 396.5 ML2B 63 631 44.5 357.5 402 C J G5-S qA port pressurization at initial (retracted) position.

Stopper Cylinder

D Lever type models Caution RS (D) 32/40/50-L RS (D) 32/40/50-B RS (D) 32/40/50-C RS (D) 32/40/50-D RS (D) 32/40/50-E Mounting base 1. Do not allow a pallet to collide with the cylinder when the lever is upright.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG

Cylinder with Lock Series MNB

B2 H S + Stroke ??