Compressed Air Preparation Filter ] Air flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000
Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)
Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.
(Press the and buttons simultaneously for 1 second or longer) [ P] Select input switch operation [3000] 3000 L/min (PF3A706H) Accumulated flow error Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons. [6000] 6000 L/min (PF3A712H) [F 1] Installation Direct mounting Install the product with 4 screws suitable for the product
[P_1 ] Select input switch operation [3000] 3000 L/min (PF3A706H) Do not use the product for flammable fluid. Fire or explosion can result. Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range.
Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]
Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.
orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F F Bore size 100 Bore size 125 3000 6 1 5 2 4 3 7 1 5 2 4 3 7 8 9 6 9 2000 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 1 5 10 20 30 50 Load (kN) Load (kN) Bore size 160 3000 5 2 4 8 3 7 9 1 2000 6 1000 Stroke (mm) 500 100 50 5 10 20 50 100 200 Load (kN) 125 Hydraulic Cylinders: Technical Data 2 Series
100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.
It must be operated manually. 0.2 0.2 0.1 0.1 00 25 50 75 100 125 150 00 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) AR20 Rc 1/4 AR40-06 Rc 3/8 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 Caution 1. Be sure to unlock the knob before adjusting the pressure and lock it after setting the pressure.
When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.2 0.2 0.1 0.1 0 3000 4000 1000 2000 0 2000 0 1000 3000 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values
For long stroke operation involving vibration and impact, the use of side supports is recommended even if the spacing value is within the allowable limits shown in the graphs. 0 1000 2000 3000 4000 0 1000 2000 3000 4000 Support spacing l (mm) Support spacing l (mm) 2. Support brackets are not for mounting.
PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000
nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !
lOO (4(00) ./ --.63 --675 (3000) / I 050 -225 (IOOO) 4SO (2000) I 0 14.5 (01) 29 (0.2) 43.5 (O.3) 58 (0.0) 72.5 (0.5) PSI (MPa) Retaining lorce is the capability that can retain a Slatic load with no vlbrallOn or impact after locking. Therefore. when used at near the upper limIt, the following guide will be helpful.
Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 651 AS Series Construction: AS2000/3000 Component Parts No. Description Parts no.
Speed 600 mm/s REA40 REA25 REA50 REA63 High Precision Guide Type REBH Order Made Auto Switches 0 1000 2000 3000 4000 5000 Stroke (mm) The above deflection data indicate values for external movement within the stroke. Max. Connection Fitting Weight The REA (basic type) is not directly connected to the load, and is guided by another shaft (LM guide, etc.).
L 1000 mm 2000 mm 3000 mm 4000 mm 5000 mm 7000 mm 10 mm IZS31-CF01-X210 IZS31-CF02-X210 IZS31-CF03-X210 IZS31-CF04-X210 IZS31-CF05-X210 IZS31-CF07-X210 IZS31-CF10-X210 Connection cable from the right-hand side of the control unit Frequency selection switch 12P modular jack (Plug for power cable) 190 36 16 30 Order connection cables separately.
Manual override Nil: Non-locking push type D: Push-turn locking slotted type F: Slide locking type 24 For Series EX600 Series SV1000/2000/3000 RoHS When I/O Unit EX600-DllE or EX600-DllF are selected, enclosure is IP40. Refer to page 50 for details.
EX600-ZT1 y Communication Cable with Connector/Communication Connector Cable with M12 RJ-45 connector EX9-AC 020 EN-PSRJ (Plug/RJ-45 connector) 14.8 Cable length (L) M12 RJ-45 6.4 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm (47.3) (44) L Cable core wire colors 1 2 1 2 3 4 5 6 7 8 Terminal no. Terminal no.