Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.
0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.
(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM
(1) Ambient and fluid temperature 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 5 Hz 20 Hz Individual EXH Pilot valve EXH Common exhaust Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated
0 to 50C Accuracy Note 1) 5% F.S. 3% F.S. 1% F.S.
0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 1% F.S. or less (connected with PF2W33) Repeatability Note 1) 3% F.S. or less 3% F.S. or less (connected with PF2W2) Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.
) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): AN (LECPA, Pulse Input Type, NPN), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting), Communication
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 200mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): AN (LECPA, Pulse Input Type, NPN), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting), Communication
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 150mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): AN (LECPA, Pulse Input Type, NPN), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting), Communication
Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type: LECPA, Pulse Input Type, NPN, I/O Cable Length: 1.5m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 50mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 100mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 200mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting:
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 3 (3m), Controller Mounting: Screw Mounting, Communication
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 150mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail Mounting), Communication
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 150mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector