Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Types Q Q Q Q Q Q Q Q 21 Q Series SYJ3000 Construction Drawings Construction A B A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 6 6 6 6 19 45 2 45 63 Thread 2180 1560 935 OUT 6 3 12 26 27 53 53 120 1.5 175 Rod end male thread Nut 3170 2270 1360 IN 4 2 8 17 17 32 32 49 1 116 80 With boss in head side 3520 2510 1510 OUT 2 1.3 3 5 7 13 25 45 0.7 96 With rubber bumper 5000 3570 2140 IN 0 0 2 3 3 7 9 18 31 56 100 Built-in One-touch fittings 5500 3930 2360 OUT 12 12 21 21 67 55 164 186 143 155 243 324 696 1062 Foot

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

New

For Air/ D Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E

15

(Recommended height 6 mm) Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS40N-200 6 1 200 80 LEJS40N-300 6 1 200 180 LEJS40N-400 8 2 400 80 LEJS40N-500 8 2 400 180 LEJS40N-600 10 3 600 80 LEJS40N-700 10 3 600 180 LEJS40N-800 12 4 800 80 LEJS40N-900 12 4 800 180 LEJS40N-1000 14 5 1000 80 LEJS40N-1200 16 6 1200 80 Motor type n FA FB FD NZ/Mounting type Z 2 M4 x 0.7 7 46 NY/

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

NCQ8

3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

C85

3 q !5 !1 10A e !2 t !9 !7 !4 !6 !0 i 2A @2 r @0 o y !8 @1 u !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

MXS Series Air Slide Table

GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

•

IA8X 1 y ZPR400 40 43 29 42.5 G H G I H 15 79.5 10 ,p mm Applicable tube ZPR25D 25 28 20 35 48~ 636 25 89.5 .6 AppHcabfe'l\Jbe O.D Q R ~S Appllcabfe tube (mm) I 24.3 16.8 6 12.8 A:PPlicab~ )iJ~ 0.0 ;P Q R _ .SI 8 . 2$.,2,; 18.7 . 15.2 . 8 ;' 4 23.3 15.8 1 0.4 .6 6 24.3 '16.8 12.8 I ~8 8 26.2 18.7 15.2 18 Vacuum Entry HorizC?"

One-touch Fittings

23.6 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Thermo-chiller

1 CH1 Circulating fluid return port CH2 Circulating fluid return port e r u y t CH2 Circulating fluid outlet q DI filter CH1 Circulating fluid outlet i !5 r t !6 !2 x 4 !3 w Parts List (170) No.