AZ1000

q w q AZ1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

1

Dimensions 32 to 50 63 to 100 Front mounting flange Front mounting flange X Q Y + Stroke X Q Y + Stroke 2-Rc 1/8 (Both sides) 2-Rc 1/8 (Both sides) CL CL Q X Y CL Bore size (mm) 32 40 50 63 80 100 ( ): Denotes the dimensions for long stroke. Specifications other than above are the same as standard type.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

, 4: OPERATE, 5: DI_C/Q, 6: DO_C/Q Data[1].bit0 PortQualityInfo 0: Input process data valid 1: Input process data invalid input Data[1].bit1 PortQualityInfo 0: Output process data valid 1: Output process data invalid output Data[2] RevisionID IO-Link device revision ID Data[3] TransmissionRate Communication speed 0: NOT_DETECTED, 1: COM1, 2: COM2, 3: COM3 Data[4] MasterCycleTime Port cycle

Pin Clamp Cylinders

CKQ CLKQ CK CLK CK CLK Table 1.

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

AREA4 33 AREA4 33 N.C. 1 N.C. 1 4 4 Load Load INP1 14 INP1 14 N.C. 1 N.C. 1 24 24 Load Load INP2 34 INP2 34 N.C. 1 N.C. 1 5 5 Load Load INP3 15 INP3 15 N.C. 1 N.C. 1 Load Load 25 25 INP4 35 INP4 35 ALARM1 ALARM1 Load Load N.C. 1 16 N.C. 1 16 6 6 ALARM2 ALARM2 Load Load 36 36 N.C. 1 N.C. 1 26 26 ALARM3 ALARM3 Load Load 17 17 N.C. 1 N.C. 1 7 7 ALARM4 ALARM4 Load Load 37 37 N.C. 1 N.C. 1 27

MGP

1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

•

Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Booster Regulator/Air Tank

VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A KT-VBA10A-1 KT-VBA20A-1 KT-VBA40A-1 KT-VBA22A-1 KT-VBA42A-1 KT-VBA43A-1 KT-VBA11A-20 Model The kit includes the parts from q to u and a grease pack. VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A Quantity Model No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Series AK1000

Porting Configuration V3 1 2 10 40 -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa t w w q q 1) Other range available.

One-touch Fittings

Q D M L 1: D is maximum diameter.

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

RSQ

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Modular F.R.L. Unit

F 25 30 41 50 50 G 20 24 35 40 40 J 7 12 14 18 18 K 4.5 5.5 7 9 9 K 4.5 5.5 7 9 9 L 2.8 3.2 4 4 4.6 M 40 50 71 88 88 B 126 177 242 278 278 Q 0 5 3.5 1.5 1.2 AC10A AC20A AC30A AC40A M5 x 0.8 35 60 80 110 110 48 73 86 92 93 56 83 110 145 155 108 160 201 239 242 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 27 30.5 38.5 38.5 _ _ _ AC40A-06 Optional specification Note 1) Note 1) For optional specifications

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

) Additional dimensions by stroke(mm) K P Q: 6 Q: 8 K P 5.1 Stroke H I K P Q: 6 Q: 8 K P 5.1 Stroke H I 20 +10 3.6 0 20 30 +10 3.6 1 +1 +20 + 4.9 6.4 0 30 50 1 +1 +20 4.9 6.4 +25 +40 +49.9 51.4 50 +25 +40 49.9 51.4 9 Lateral Vacuum Entry Series ZPR Without Buffer/Female Thread How to Order ZPR 10 F GS 06 B5 Pad diameter (mm) Mounting thread diameter/female thread (Refer to Table 1 for applications