Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

ZL3-OM00801

/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4

IDX-OM-U022

ADH-E400 1 IDFA100F150F 4 3 4.2 IDX-OM-U022 4. 4.2.3 V ON 1. 2. 3. 4.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQC

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: 8 A or less (including shorts), and When controlled by a circuit protector (fuse) with the following ratings: No-load voltage (V peak) Max. current rating 0 to 20 [V] 5.0 100 Over 20 [V] and up to 30 [V] Peak voltage value (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

3 Port Solenoid Valve/

V 600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

Heavy Duty Stopper Cylinder Series RSH/RS1H

set screw OUT Black Slotted set screw Indicator light 2.5 Indicator light DC () Blue 2.5 6.2 5 SMC SMC 6.2 5 SMC SMC D-Y59B, D-Y69B 27.3 3.4 29 OUT (+) Brown 3.4 Main switch circuit 8.5 12.5 Most sensitive position Most sensitive position 12.5 OUT () Blue 13 2-Color Indication Solid State Switches/Direct Mount Type D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) Auto Switch Specifications Grommet D-Y7W

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 772

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

Vacuum Pad

1000 V = D2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output Voltage output Note 5) 1 to 5 V Analog Linearity: 2% F.S. or less, allowable load resistance: 100 k or more specifications output Current output Note 6) 4 to 20 mA Linearity: 2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC Power supply voltage

PF2D

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Model Note Accessory/Option FH34 0 1 CB-48H Petroleum, Water-glycol, Emulsion to CB-48H-V Phosphoric ester FH44 0 1 Differential pressure indicator CB-52H Petroleum, Water-glycol, Emulsion FH342 CB-52H-V Phosphoric ester FH54 0 1 CB-64H Petroleum, Water-glycol, Emulsion to CB-64H-V Phosphoric ester FH64 0 1 FH34 0 1 CB-49H Petroleum, Water-glycol, Emulsion to CB-49H-V Phosphoric ester FH44

HRX-OM-W002

M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG

180

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(lead wire length: 600mm) D-DIN type terminal 4 5 6 7 9 Order made Port size M5 01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V

VKF300

(lead wire length: 600mm) D-DIN type terminal 4 5 6 7 9 Order made Port size M5 01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V