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Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. 5-5-13 2 Series VPA300/500/700 Construction Standard Body ported Base mounted Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts

L V V 100 REBHT32 REBH(T)25 10 Load weight W (kg) REBH15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 73 Series REBH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2+ 3 1 Load factor n 1 = W/Wmax Note Item Review W.

(MPa) Port 2 (A) pressure (MPa) Port 2 (A) pressure (MPa) 0.8 0.8 0.8 0.7 0.7 0.7 0.6 0.6 0.6 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130

PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10 -1 20 NL/min 200 NL/min PF2A721 7 CFM10 -1 71 CFM10 -1 50 NL/min 500 NL/min PF2A751 18 CFM10 -1 176 CFM10 -1 0.927= -41No.PF-OMO0007CN

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

(with polarity protection ) Current consumption 40 mA or less Switch Output NPN or PNP open collector OUT1: General-purposeOUT2: Valve control Maximum load current 80 mA Max. applied voltage DC26.4 V Residual voltage Max. 2 V (at 80 mA load current) Response time 2.5 ms or less (response times available for anti-chattering function: 20, 100, 500, 1000 or 2000 ms) Short circuit protection

600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a

A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15

NBR seals (Nitrile rubber) FKM seals (Fluoro rubber) R V Data Use of stainless steel as the piston rod material will be treated as a special order.

NBR seals (Nitrile rubber) FKM seals (Fluoro rubber) R V Data Use of stainless steel as the piston rod material will be treated as a special order.

l'::: 0 200 400 600 800 1000 1200 Air flow rate Qlmin (ANR) c :~: 0 AMH450 I I Inlet air pressure 0.3MPa / 0.5MPa 0.7MPa / V V '" 0.06 a. ::;; I '/V //V ~ ~ 0.04 500 1000 1500 2000 2500 Air flow rate Qlmin (ANR) 3 SeriesAMH Construction AMH150 ~ AMH650 AMH850 OUT OUT IN IN ... ... ...

[V] [V] [V] [L/min] [L/min] [L/min] [L/min] 20L/min( 20L/min( 20L/min( 20L/min( 1 1 1 1-5V 5V 5V 5V ) ) ) ) [F22] 46 No.LFE*-OMY0008 [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 700, 800 200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32 MGCll40 MGCll50 Model CDGIBA20 CDGIBA25 CDGIBA32 CDGIBA40

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC. Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.