Bore Size: 20mm, Action: D (Double Acting), Dust Cover: F (Fluoro Rubber (FKM))

Stations: 16 Stations, Option 1: -, Option 2: -, Port Size: -

Stations: 16 Stations, Option 1: -, Option 2: -, Port Size: -

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 16, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 16, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Support bracket: None, Auto Switches: Without auto switch,

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 16, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number

Series: VQZ200, Stations: 16 Stations, Option: -, Thread: -, CE Compliant: -

Series: VQZ300, Stations: 16 Stations, Option: -, Thread: -, CE Compliant: -

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 16, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 16, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Support bracket: None, Auto Switches: Without auto switch,

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: CF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5, Valve Type: Angle type, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] CF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch

Series: 2 (VQZ200), Stations: 16 Stations

Series: 3 (VQZ300), Stations: 16 Stations

Stations: 16 Stations

Port Size: A01 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø3.18/ø2)], Stations: 16 Stations

Port Size: A02 [Stacking Base Type (Barb Fitting: ø6/ø4, Tubing: ø4/ø2.5)], Stations: 16 Stations

Port Size: M02 [Body Ported Stacking (Barb Fitting:ø6/ø4, Tubing:ø4/ø2.5)], Stations: 16 Stations

Port Size: M01 [Body Ported Stacking (Barb Fitting:ø6/ø4, Tubing:ø3.18/ø2)], Stations: 16 Stations

Port Size: B01 [Bar Base Type (SUP/EXH port: M5, OUT port: M3)], Stations: 16 Stations