Hand Valve Series VH 1

4000 6000 0 0 0 200 400 600 800 1000 1000 2000 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) VH600 Effective area S = 194 mm2 Supply pressure MPa Supply pressure MPa 0.7 0.7 Valve output pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 10 15 0 5 Flow rate (m3/min (ANR)) 5-8-8 3 Hand Valve Series VH Construction VH200 8 5 6 4 3 1 7 9 SA 1 (P) VA 4 (B)

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

cm3/min or less 1200 cm3/min or less 1600 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less 4000 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when horizontal.

VH Series, 4 Way Hand Valve

4000 6000 0 0 0 200 400 600 800 1000 1000 2000 Flow rate /min(ANR) Flow rate /min(ANR) Flow rate /min(ANR) VH600 Effective area S=194mm2 Supply pressure MPa 0.7 0.7 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 0 5 10 15 Flow rate m3/min(ANR) 3 Series VH Construction Construction VH200 5 6 4 3 1 7 8 1 (P) 4 (B) 2 (A) 3 (R) 2 VH300/400 5 6 4 3 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

EX500-GPR1A.eng

Supply voltage for block DC24V Connected block station Double solenoid valve Relay output module ( 2-point output ) Connected block Solenoid valve ( single, double ) Relay output module ( 1-point output, 2point output ) SV1000/2000/3000/4000 VQC1000/2000/4000 S0700 Current consumption 100mA or less ( at rated voltage ) Item Specification Item Specification Double solenoid valve 100mA or less

① Standard strokes from 100 to 1000 mm are available in 100 mm increments, and 1200 to 2000 mm strokes are available in 200 mm increments.
② Intermediate strokes can be manufactured from 1 mm in 1 mm increments for the standard model.
③ Long strokes are available up to the max. available stroke length in 1 mm increments.

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

ARM10/11

Regulator for manifold Number of stations Body size 1 1 station Port size (OUT side) 1000 2000 ARM1000-6A1-01G 10 10 stations 01 8 1 Piping Accessory Thread type Symbol IN OUT A1 A2 B1 B2 Nil N Rc NPT None (With plug) With pressure gauge Nil G Manifold side Body side Manifold side Body side Common Note 3) When ordering single unit ARM1000 ARM1000A 1361213613Regulator main body ARM2000 ARM2000A

Hand Valve Series VH

200 400 600 800 1000 1000 2000 0 0 0 Flow rate (l/min)(ANR) Flow rate (l/min)(ANR) Flow rate (l/min)(ANR) VH600 Effective area S=194mm2 Supply pressure MPa 0.7 0.7 Valve output pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 10 15 0 5 Flow rate (l/min)(ANR) 3.6-7 Hand Valve Series VH Construction VH200 5 6 4 3 1 SlA 7 VlA 8 1 (P) SlA 4 (B) 2 (A) 2 3 (R) VlA VH300 / 400 5 6

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Table of Contents

Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

(Or None in the Case of No Switch), Dual, Tandem Option: XC10 (Dual Op., Dbl. Rod)

Magnet: Built-in, Mounting: Basic, Bore Size: 2 1/2", Stroke A: 4", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 1", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Dbl. Rod

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W2/3. Note 2) Output system can be selected during initial setting. Note 3) Without lead wire.

Series PF2W Digital Flow Switch For Water

VAC for 1 minute between terminals and housing 50 M or more (500 VDC measured via megohmmeter) between terminals and housing 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, 25C reference).

VQC

VQC1000/2000 Locking type (Manual) Non-locking push type (Tool required) Bore 4.2 Bore 3.2 Push down the manual override button with a small screwdriver, etc., until it stops. The manual override will return when released.

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

EXxx-OMQ0015CN

1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766 0 1 0 0 4 PLC : 032767 +0 +32767 PLC : 3276865535 -0 -32767 : 15 V 50001000 4VPLC 4000 -50No.EX-OMQ0015CN (1) [H.T.]

Digital Flow Switches Series PF2A

(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.