CP95

See page 6-13-13 for dimensions. 6-13-5 5 Series CP95 Specifications Bore size (mm) 32 40 63 100 50 80 Action Double acting Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature Not required (Non-lube) Lubrication 50 to 1000 mm/s

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

MHF Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None MHL Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 MHR 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MHK 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and

Thermo-chiller

In locations at an altitude of 3000 m or higher (Except during storage and transportation) * For altitudes of 1000 m or higher Because of lower air density, the heat radiation efficiencies of the devices in the product will be lower in the location at an altitude of 1000 m or higher.

With Factory Installed

O~ 0.2 0.3 04 05 0.6 O~ 08 09 00 1000 2000 Auto drain Flow rate /min (ANR) Inlet pressure MPa (Float type normally open) AW4001-04 AW4001 -04 OOrain line should be Bmm or more and should be less than Sm. Be sure not to have any upward turns in the drain line which would prevent drainage. -0.25 H---''t' .:c ' +-+-t---+--r--.

HRX-OM-W038

Y-strainer Rc1/2 #500 to 1000 Install either the strainer or filter. If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 2 Filter Rc1/2 20m HRS-PF003 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #1000 Install either the strainer or filter.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

LEH_C

200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2 (3m LEC-T1-3JG* (LEC ) 6.

JXCx-OMT0028CN

200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 1000 (1001 to 1400) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 204 (215) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000 (1001 to 1500) 133 (140) 18 (29) 150 (180) 92 (100) 180 (220) 54 (60) 215 (227) 0.040 0.073 100 1500 750

2–4

style (D-A73C/A80C) and A9/A9 V style: 1000 V AC/min.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

MHF Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None MHL Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 MHR 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MHK 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

M = W x 9.8 (Ln + An)/1000 Corrected value of moment center position distance An: Table (1) Examine Mr. Mr = 0.2 x 9.8 (40 + 15.5)/1000 = 0.1 A2 = 15.5 Obtain Mar = 13 from Va = 300 in Graph (3). Find the allowable static moment Ma (Nm). Pitch, Yaw moment: Graph (2) Roll moment: Graph (3) 13 Find the load factor 1 of the static moment.

Pin Clamp Cylinder Series CKQ/CLKQ

(Between lead wire and the case) 1000 m/s2 300 m/s2 Impact resistance 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute 1) (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire and case) Withstand voltage Except magnetic resistant 2-color indication type solid state switch (DP5DWL/P5DWSC).

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

PSxx-OMM0006CN

-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000

VQZ100V-OMT0001

/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 DC L,M L,M L,M L,M > > > > > > DIN DIN DIN DIN > > > YSYOS (YZ) ( ( ( ( ) ) ) ) 90 [ 0.1Nm ] 8 No.VQZ100V-OMT0001 VQZ Series/ / / / > > > (YZ) ) 1V (+-) () (1mm) 3.23.7mm 3 3 3 3 2 2 2 2 0.2~0.33mm 1.7mm [] () DXT170-75-1