Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side Seal type Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Metal seal Rubber seal 0 1 R Note 2) Note 1) Applicable to DC specifications. Note 2) See page 35 for details on external pilot specifications.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

(Gray) Analog output (Gray) OUT1 (Black) OUT2 (White) Load With analog output With analog output Main circuit Main circuit 1k 1k Load OUT1 (Black) OUT2 (White) 12 to 24VDC 12 to 24VDC Load Load DC () (Blue) DC () (Blue) ZSE40 (F) ISE40--70 (L)-(M) ZSE40 (F) ISE40--30 (L)-(M) DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2k 1.2k Load

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

(+) 1.2K (Brown) DC (+) (Gray) Analog output (Gray) Auto shift input Main circuit Main circuit Main circuit Main circuit Load Load Load Load 1k 12VDC to 24VDC 6.8K 12VDC to 24VDC (Black) OUT 1 (Black) OUT 1 (White) OUT 2 (White) OUT 2 (Blue) DC () (Blue) DC () ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L)-(M) 50 60 50 60 With analog output With auto shift input (Brown) DC (+) 1.2K

AC Servo Motor Driver (SSCNET /H Type)

Load DOCOM (Note) 24 V DC 10% 300 mA Note. If the voltage drop (maximum of 2.6 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. -12- 4. Axis No. settings Set the control axis No. with the rotary switch.

PSE5xx.eng

N.C. 3 Blue (DC-) N.C. Blue (DC-) Black (IN: 1 to 5 V) 4 Blue (LINE(-)) Black (IN: 4 to 20 mA) Brown DC(+) Lever A Caution For compound pressure For vacuum For low pressure For positive pressure Pressure range N.C. Main circuit After maintenance is complete, perform appropriate functional inspections and leak tests.

VQ1000V-OMV0001

VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) 3 30 ( ) 1 VG32 2 ()ISO VG32 7 No.VQ1000V-OMV0001 VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 0.1Nm 2 A B 1.7 ON OFF A B VQ1000 2 DC DC DC DC 2 ON OFF ON OFF 1.7 VQ20002 A B .

REA/REB

For 10, 15, 20 CE2 Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) ML2B Applicable load AC DC Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 3-wire C J G5-S Reed switch Solid state switch Reed switch Solid state switch A96 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW 3-

NCA1

2-wire DC 2-wire non-polar DC 3-wire NCM 3 pin 4 pin Blue 2 pin 2 pin 4 pin OUT () 3 pin 1 pin OUT (+) NCA Brown Blue OUT () OUT ( ) DDC () DC (+) OUT Brown Blue Black Diagnostic output DC 4-wire Brown Orange Blue Black OUT DC () DC (+) -X 20Data Connector M8-3 pin/4 pin Unit : mm ( ) : ft Sensor 10 (0.03) 31.4 (0.10) Lead wire length M12-4 pin Sensor 44 (0.14) Lead wire length

PSE100

Main Circuit Main Circuit 12 to 24V DC 12 to 24V DC 2 2 ISl IN 1 to 5V IN 4 to 20mA 4 3 ZSM PFl How to select channel When CH.SELECT terminal is open, channel A is selected. When it is connected to GND , channel B is selected.

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(White) Load With analog output With analog output 1kW Main circuit Main circuit 1kW Load OUT1 (Black) OUT2 (White) 12 to 24VDC 12 to 24VDC Load Load DC () (Blue) DC () (Blue) ZSE40 (F) ISE40-m-30 (L)-(M) ZSE40 (F) ISE40-m-70 (L)-(M) DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2kW 1.2kW Load With auto shift input With auto shift

ITV

Further, use DC power with sufficient capacity and a low ripple.

E-P HYREG ® Series VY1 1

0.02 to 0.2 mA DC 1 to 5 VDC 0 to 10 VDC 4 to 20 mA DC 0 to 20 mA DC 0.6 0.6 0.4 0.4 Note) Other body sizes add the dispersion on the above data when the main valve activates. 0.2 0.2 VY170-5 VY190-5 0 1 2 3 4 5 0 1 2 3 4 5 V V VY170-6 VY190-6 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V VY170-7 VY190-7 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY170-8 0 5 10 15 20 VY190-8 0 5 10 15 20 3 3 mA mA

PSE540/560

Wire core color For PSE200 (ZS-26-E) Brown (DC (+)) Black (OUT: 1 to 5 V) Blue (DC (-)) Not connected Connector no. 1 2 3 4 PF2 For PSE300 (ZS-28-C) Brown (DC (+)) Not connected Blue (DC (-)) Black (OUT: 1 to 5 V) IF Controller Data Handling Confirm that the numbers on the connector match the colors of the wires and that the wires are inserted to the bottom.

ZSE2/ISE2

Connection example with a PLC at common terminal Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Switch DC ( + ) Brown Lever DC polarity indicator Connector Socket Hook OUT Black + O PLC Input terminal DC () Blue High vacuum Pin Slot Housing COM 12 to 24 VDC + Supply pressure Steady adsorption Filter case Set point Unsteady adsorption Caution 2.

ZSE40/ISE40

circuit 1 k 1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White

ZSE F/ISE

(+) 1.2 k (Brown) DC (+) (Gray) Analog output (Gray) Auto shift input Load Load Main circuit Main circuit Main circuit Main circuit Load 1 k 12 VDC to 24 VDC Load 6.8 k 12 VDC to 24 VDC (Black) OUT 1 ZSE ISE (Black) OUT 1 (White) OUT 2 (White) OUT 2 PSE (Blue) DC () (Blue) DC () Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Model Selection 1

Oxygen x Gas Specify with a rectifying circuit built-in coil or DC voltages.

VCA

Lead wire color Rated voltage AWG20 DC Red Black 100VAC Blue Blue SMC 200VAC Red Red Other AC Gray Gray Wiring conduit Seal (VCW20-15-6) There is no polarity for DC. Bore size G1/2 Tightening torque 0.5 to 0.6Nm DIN connector Since internal connections are as shown below for the DIN connector, make connections to the power supply accordingly.

Series VCL

SOL. 2 ( ) 2 ( ) Without light Without light Lead wire color Rated voltage Conduit terminal, DIN connector DC Red Black 100VAC Blue Blue DC circuit AC circuit 200VAC Red Red Other AC Gray Gray ZNR Rectifying device DC does not have polarity. ZNR 1 ( ) 1 ( + ) DIN connector SOL. SOL.

VCW

SOL. 2 ( ) 2 ( ) Without light Without light Lead wire color Rated voltage Conduit terminal, DIN connector DC Red Black 100VAC Blue Blue DC circuit AC circuit 200VAC Red Red ZNR Rectifying device Other AC Gray Gray ZNR 1 ( ) DC does not have polarity. 1 ( + ) SOL. SOL.