VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

S070

20 151 159 L1 L2 4-11-13 14 Series S070 Manifold Options Blanking plate assembly (for SS073A) 7 SS070A-10A (for separable base) This assembly is mounted on a manifold block where the valve is removed for maintenance or a replacement valve is going to be mounted. 12 Blanking plate assembly (for SS073B) 7 SS070B-10A (for bar base) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Residual Pressure Release Valve

fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 13 17 24 31 With One-touch fitting with a push

7

VXD2 Z 1A VXD2 Z 3 0 A A VXK Enter standard product number.

Integrated Controller

B A A B B-B In-line motor Component Parts Component Parts (Top/Right/Left side parallel only) No.

Short Stroke Electric Actuator Series LX

L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 212 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BD Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 28 G 58 5H9 +0.030 0 depth

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

GDM2C 1454 A

Transfer

Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

PSxx-OMV0003CN

NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Rotary One-touch Fittings Manifold Series KM

D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Vacuum Saving Valve

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 CAC403 or equivalent ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 2 Vacuum Saving Valve Series ZP2V Dimensions Vacuum generator side Vacuum generator side M2 M2 H 1 H 1 Vacuum generator side L2 L1 L3 L2 M2 H 1 L2 L3 3 (L4) (L4) No.0.8

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CQ2

A RR1 Part No.

CLK1

50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 Safety distance (mm) 40 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SPAIN/PORTUGAL SMC Espaa, S.A.

IDX-OM-M051

In an environment where the product will come into direct contact with rain, wind and snow or with a lot of moisture (relative humidity 85% or more). (Note) In a location with a large quantity of dust. In a location containing flammable or explosive gases. In a location exposed to corrosive or flammable gases or solvent.

AC Servo Motor Driver (MECHATROLINK-II type)

Error Gr.1 A.320 Regenerative Overload Gr.2 Alarm A.330 Main Circuit Power Supply Wiring Error Gr.1 A.400 Overvoltage Gr.1 A.410 Undervoltage Gr.2 A.450 Main-Circuit Capacitor Overvoltage Gr.1 A.510 Overspeed Gr.1 A.511 Overspeed of Encoder Output Pulse Rate Gr.1 A.520 Vibration Alarm Gr.1 A.521 Autotuning Alarm Gr.1 A.710 Overload: High Load Gr.2 A.720 Overload: Low Load Gr.1 A.730 Dynamic