Series PF2D Digital Flow Switch For Deionized Water and Chemicals

VAC for 1 min. between external terminals and case Insulation resistance 50M or more (500 VDC Mega) between external terminals and case Vibration resistance 4.9 m/s2 Impact resistance 490 m/s2 to X,Y,Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 s, Rise time: 1 ns Weight 140 g (without lead wire) 225 g (without lead wire) Port size 3/8 inch tube 1/2 inch tube

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Auto switch types D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

Mechanically Jointed Rodless Cylinder Series MY1

1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Sine Rodless Cylinder Series REBR Direct Mount Type

Minimum operating pressure 10 to 60C Ambient and fluid temperature 50 to 600mm/s Piston speed Non-lube Lubrication 0 to 250st: +1.0, 251 to 1000st: +1.4, 1001st and up: +1.8 Stroke length tolerance 0 0 0 Direct mount type Mounting Standard Strokes Maximum stroke with switch (mm) Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150, 200, 250, 300, 350, 400 450, 500 15 1000

Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Pneumatic Transfer System Series MF

Standard equipment (shock absorber, stopper bolt) m 2 1000 E = () (Note) = 1.4a (a = average speed) Es: Allowable kinetic energy for intermediate stop with air pressure circuit (J) Ps: Operating pressure limit for intermediate stop with external stopper, etc.

5 Port Solenoid Valve Series SV

0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000

5 Port Solenoid Valve SY Series

Body ported Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 20 25 32 40 40 50 63 80 100 Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation

High Vacuum Angle Valve, XL Series

1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa =

Pressure switch for energy-saving control ejector with N.O. type valve

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

Digital pressure switch for energy-saving control ejector

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

Digital pressure switch for energy-saving control ejector

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

Digital pressure switch for energy-saving control ejector

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. 11 - NO. ZQ-OM01501 No.

Modular F.R.L. Pressure Control Equipment

The part number for bracket assembly for 1000 cm3 is AF50P-050AS (applicable to the AL30 to AL60).

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

DOT/J844 Nylon Tubing

Minimum Bending Radius (mm) 1/8 9.4 5/32 12.7 3/16 19.1 1/4 25.4 5/16 31.8 3/8 38.1 1/2 50.8 5/8 63.5 3/4 76.2 Minimum Burst Pressure (psi) at 24C (75F) 1000 1200 1200 1200 1000 1000 950 900 800 Material Nylon 12 (Polyamide) *Note: Recommended operating fluid and temperature range provides best performance and longest life.

Vacuum

These values orove to de convenient and practical lor ejector sizing purposes. l V = 1 x d ' x ' 4 1000 inside diameter ot tubing (mm), tubing length (meters, m), the lesser capacity of llow, O, or O.

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 Stroke [mm] 100 100 to to 1000 1000 Refer to the applicable stroke table. [UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply.

Booster Regulator Series VBA1110 to 4200 1

Handle operated type Air operated type VBA1110 VBA200 VBA400 Model AV Max. 2 Pressure increase ratio VBA2200-03 VBA4200-04 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 Note) 400 60 1000 1900 1000 1900 Max. flow (l/min (ANR)) VBA1 2 to 4 AU 1/2 (IN/OUT) 1/4 (IN/OUT) Connection port size Rc 3/8 (IN/OUT) 3/8 (IN/OUT) 1/2 (IN/OUT) Fluid Compressed air 1/4 Exhaust port size Rc 3/8 1/2 1/2 3/8 VBA1110