Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

PF2A/PF2W

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

0.5

mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Error signal Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Output

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

100

Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.

CJ5-S

, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Blocking Workpiece Weight and Center of Gravity 42.5 150 Center of gravity 5 65 Workpiece no. Wn Weight mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

Support Guide/11-LEFG Series

thread depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60) 32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350

MX-OMP0051

16.1 8.1 8.1 16.1 16.1 35.1 35.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 22 16 16 23 23 29 48 48 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 22.9 23.9 23.9 23.9 29.9 38.9 63.9 63.9 63.9 MXQ25(A) 34.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4