LJ1H

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

VFR

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

HRX-OM-Y098

of the usage time of dustproof filter .5-23 5.4.6 Software version screen .5-24 5.4.7 CH1 setting screen .5-24 Temperature rise/drop alarm (AL10/AL11).5-25 TEMP READY alarm (AL12) of TEMP READY function .5-27 Offset (TEMP OFFSET) function .5-30 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-34 Electric conductivity and alarm setting (AL28) .5-36 5.4.8 CH2 setting

HRX-OM-W032

25 Cooling capacity [kW] Cooling capacity [kW] 20 20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1

CJ2

D-H7LF 1 25 Precautions 2 10 D-A7/A8 D-A73C/A80C 1 5 2 5 D-F7V D-J79C Refer to p.1.3-3 before handling. 1 5 Rail mounting 2 15 D-A79W D-F7WV 1 10 D-F7, J79, D-F79F, D-A7H, A80H D-F7W, J79W D-F7BAL 2 15 1 15 2 25 D-F7LF 1 25 Accessory/Refer to p.1.3-12 for details.

17

Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Vacuum Pad: Ball Joint Type

50 +40 +25 +52 722 Lateral Vacuum Entry: With Buffer ZPR Series ZPR FJ K10-0-A14 (With buffer) 40 50 S Width across flats 10 Width across flats 10 S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m PROFINET @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherCAT K @8 PCA-140180m M12, 5 pins, A-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet EX260 PROFIBUS DP CC-Link @9 EX9-ACm-1 M12, 5 pins, B-coded, Socket, Straight 1 m, 3 m, 5 m K #0 PCA-140180m M12, 5 pins, B-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

Refrigerated Air Dryers

Refer to pages 22 and 25.

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

48

Refer to the standard model numbers. 12 (10 x 2) 5 to 95 16 (12 x 2) 20 (16 x 2) 5 to 145 25 (20 x 2) 32 (25 x 2) Applicable stroke [mm] 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) Refer to pages 10 and 11 for cylinders with auto switches. 5 to 195 Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height Minimum Stroke for Auto Switch Mounting

HRX-OM-S004

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10

4/5 Port Air Operated Valve Series SYJA3000

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-25 Series SYJA7000 Specifications Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 Fluid 2 position single Operating pressure

Compact Cylinder with Lock Series CLQ

9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) VH1 W1 X H1 H2 L1 C1 20.5 23 12 14.5 14 17.5 12 15 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series CLQ Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G E (g6) F (h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 14 1 19.5 29 22 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0 0.043 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 5 12 21.2 18 1.5 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 6 14 1.5 34.5 25 20 42 17 10 0.5