MGZ Series

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

CLA

S start and next stop, accuracy speCified (depending lIpon Ihe cases, but 300 rom will be the standard) sometimes will nOI come true, please take into consideration. 11 ConSlr1lclion/Pa~ts list e ~-Long stroke design Parts List Notes : I No. Description Notes Material Material No.

90

Flow Rate Characteristics Relief Characteristics IR2020-02-A Supply pressure: 0.7 MPa IR2020-02-A Back pressure: 0.7 MPa ARJ 0.7 0.7 0.6 0.6 AR425 to 935 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 ARX 0.4 0.4 AMR 0.3 0.3 0.2 0.2 ARM 0.1 0.1 ARP 0 0 500 1000 1500 2000 0 0 150 300 450 600 IR-A IR-A Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] IR IRV Pressure Characteristics VEX Supply

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

Low Differential Pressure Sensor

(not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F.S. or less 1.0% F.S. or less 1.5% F.S. or less Accuracy (to display value) (25C) Output current: 4 to 20 mA (within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F.S.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Stations L1 L2 L3 L4 2 123 112.5 91.5 15.5 3 4 5 6 7 8 9 10 148 137.5 123 12.5 173 162.5 144 14.5 198 187.5 165 16.5 135.5 125 102 16.5 160.5 150 133.5 13.5 185.5 175 154.5 15.5 210.5 200 175.5 17.5 148 137.5 112.5 17.5 Stations SS5X3-45GDBC4 C6 Stations L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 160.5 150 129 15.5 185.5 175 150 17.5 185.5 175 160.5 12.5 210.5 200 181.5 14.5 148 137.5

AMF

E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

AC Servo Motor Driver (Pulse input type)

Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression

OMR0031

Speed Vc Acceleration Aa Speed [mm/s] Total travel distance S Time [s] Positioning time Tp LAT3LAT3MLAT3FShortest positioning time [ms] 600 350 700 Shortest positioning time [ms] Shortest positioning time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

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Pertormance Prechion and slrengh in conliguralions to meel nost appljcations Plcision vs, Moment loading Unmatched Versatility from The leader in Pneumatics SLIDE TABLE Technology Work Table ' I cytinder , , I Conventional Syslem Linear Bearing univcEal lilourl Slide table MuHiple moLrnting opions Standard Stroke (mm) 25 30 40 50 60 75 100 sffi 125 150 '175 200 225 250 275 300 350 400 L I

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

Modular F.R.L. Units

200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa Number of needle rotations Number of needle rotations Number of needle rotations 14 PF2M7(-L) Series Flow Rate Characteristics at Negative Pressure (Reference Data) When the PF2M series is used with negative pressure (70 to 0 kPa), the measurable range (warranty range of the specifications

Compact Cylinder with Solenoid Valve/

other than 300 mm, refer to the plug connector lead wire.

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100