Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

VCL

(Type H) VCS 20 1 G Series Lead wire length w 20 30 40 Class 2 Class 3 Class 4 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Tilt the screwdriver down in direction q so that the clip slides out in direction w. Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

Electric Actuator with Integrated Guide Series LTF

or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed mm/s Positioning repeatability mm Guide type Motor type Lead screw Series Capacity Brake Ground

BP1000

) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code Bonnet Standard Panel installation 3) 01 02 06 10 20 30 No code P Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

BP1000

Pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) No code P 01 02 10 20 30 Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

RSH/RS1H

, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

08-cs1w-e

Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Kit no.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

air-filter-e

100 200 300 400 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

MLGC

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

Air Preparation Equipment

100 200 300 400 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type plug connector (M) (Lead wire length) 42 About 300 About 300 53.1 [59.6] (Lead wire length) 42 [48.5] 92.3 [94.9] 79.4 [82] 1 111.6 53.2 [54.5] 98.6 1 62.8 [ ] for AC Other dimensions are the same as the grommet type.

53

V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 134 Thermo-chiller Inverter Type HRSH090 Series Circulating Fluid Temperature Controller Circulating Fluid/Facility Water Line Equipment Circulating Fluid Line Power supply