3 Port Air Operated Valve VPA3145/3165/3185 Series

1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

WRF100

WRF100-T200/T240/T270 WRF-T/T-type clamp arms (Without cover) 2 x M12 x 1.75 depth 24 4 x M8 x 1.25 depth 12 15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95

Clean Regulator/Fluororesin Type

56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 16 OUT IN 19 6 38 38 100 886 SRF Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

REC

RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114 90 0.5 W W W 0.5 F 117 108 95

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 2000 mm/s) Series Variations Note 5) The data above provide a guide for selection but is not guaranteed.

Fluoropolymer Piping Equipment

L2, L2 22.5 19.5 21 40 39 54 53 25 6.4 13.7 9 18 LQ3A34 66 65 21.3 15.4 LQ3A36 66 26.7 20.5 LQ3A37 44 41 82 79 7.5 33.4 26.3 LQ3A41 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension 21.3 15.4 22 LQ3A42 26.7 20.5 LQ3A43 33.4 26.3 LQ3A44 49 47 88 86 60.3 52.5 LQ3A51 26.5 24 32 57 54.5 95

Thermo-chiller

Fluid level indicator Circulating fluid return port (CH2) Rc1/2 Power cable entry Applicable wire total: 14.5 to 18.5 Circulating fluid outlet (CH1) Rc1 Communication cable entry Applicable wire total: 6.5 to 10.5 Drain port Rc1/4 Caster (unfixed) with locking lever 14 HRLE Series Compact Dual/Basic Type for Lasers Dimensions HRLE090-W-20/40 484 385 150 Anchor bolt mounting position 965 95

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95

Slider Type Ball Screw Drive/11-LEFS Series

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Series 10-, 21- AW-B Filter Regulator

Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95

Support Guide/11-LEFG Series

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

HEC_W-E

. :-40 to 70 C (No dew condensation and avoid freezing inside by draining water completely) Storage environment Humidity : 5 to 95%RH Environment : No corrosive gas, solvent such as thinner and flammable gas Indication accuracy: +/0.2 C. Stability: +/0.01 to 0.03 C (recirculating fluid OUT is directly connected with IN) Accuracy related to temp.

Air cylinder (Series compatible with secondary batteries)

D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 65 70 10 55 60 D-M9V-900 1 D-M9WV-900 55 30 (n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.

Magnetically Coupled Rodless Cylinder

39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26 Y 54.5 64 72 79 93 M 5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95

Check Valve Series AK 1

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

13.2 15.2 13.2 15.2 15.2 18.5 15.2 18.5 15.2 18.5 18.5 21.7 18.5 21.7 18.5 21.7 71 71.8 71 71.8 81.1 83.2 81.1 83.2 81.1 83.2 88.2 89.9 88.2 89.9 88.2 89.9 65 65.8 65 65.8 73.6 75.7 73.6 75.7 73.6 75.7 82.2 83.8 82.2 83.8 82.2 83.8 16.8 19 16.8 19 19 21 19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

High Purity Fluoropolymer

Model L K J M N T W H E LQ2P2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 14.5 LQ2P2B LQ2P2C 18 6 19 19.9 7 16 73 LQ2P5B LQ2P5A LQ2P4B LQ2P4A LQ2P3B LQ2P3A 83 20.5 24 6 22 26.2 7 24 95 82 24.5 30 9 28 33.1 21 7 30 110 93 30.5 36 9 32 40 26 10 36 108 Union: LQ2U Metric sizes Applicable tubing O.D.