Compact Manifold Regulator

mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3 selections) Yes 1% F.S.

LEC-OM02704CN

80 0 0 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

Adsorption Plate

Adsorption surface size SP2130 SP2230 SP2330 SP2430 SP2530 SP2630 50 x 50 40 10 100 x 100 80 10 P1 150 x 150 105 10 P1 200 x 200 130 10 250 x 250 155 10 P2 P2 300 x 300 180 10 Special Order Products Products with a stainless steel body or in other shapes can be manufactured. Consult SMC separately.

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Mounting: D (Double Clevis), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 80mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200/80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 80mm

Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 80mm

Mounting: A (Both Ends Tapped), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 80mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200/80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Double Clevis, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 200mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

RHC

7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they

SL5200

100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.