VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

AZ1000

psig (1.4 MPa) 50 0.34 0.69 100 0.62 90 80 40 0.28 0.55 Delivery pressure (slpm) Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) 0.48 70 0.41 60 30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Table of Contents

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

HRX-OM-W060

Status (7): TEMP READY signal output continues since the temperature is now back within the Out Time range of 200 sec even though it was temporarily outside the Low range. Status (8): TEMP READY signal turns OFF when 200 sec has passed after the temperature rises above the High range. TEMP READY alarm (AL12) is simultaneously activated.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Type Nozzle model Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Nozzle size Standard type Nil 01 02 03 04 11 12 13 21 22 23 24 31 32 33 34

Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

Digital Gap Checker

0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch ON [mm]

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

HRX-OM-Y098

Fig. 8-8 Cooling Capacity (HRL100/200/300-A-20) Documents HRL Series 8-8 HRX-OM-Y098 Chapter 8 Documents 8.5 Pump Capacity 8.5.1 HRL100-A-20 CH1 0.6 60 0.5 50 Circulating fluid outlet Pressure [MPa] 0.4 40 Lifting head [m] Usable flow rate range 0.3 30 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow[L/min] Fig. 8-9 Pump capacity(HRL100

10

58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

AMH

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

Modular Type Regulator Series AR

95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (pilot air supply port) 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump

PA3000/5000/PAX1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air

HRX-OM-W002

Heating capacity [W] 600 600 Heating capacity [W] 40 40 32 32 25 25 400 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-12 Heating capacity (HRR012-A/W-20,HRR018-A/W-20) 9.5.3 HRR024-A/W-20,HRR030-A/W-20 Ambient temp. 800 800 or Ambient temp.

IR1000/2000/3000

0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.