Direct Operated Precision Regulator Modular Style Series ARP3000 1

) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL

2/3 Port Valve

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Mounting: B (Basic Style), Bore Size: 32mm, Thread: TN (NPT), Stroke: 250mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Mounting: Basic Style, Bore Size: 32mm, Thread: NPT, Stroke: 250mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs., Speed Control Type: -, Applicable Tubing: -, Suffix: -

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Series 12-REA Sine rodless cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

EXxx-OMZ0016

number. *2: Select a protocol before performing pairing (V.2.0: 1 Mbps, V.1.0: 250 kbps).

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2 Propane Nitrogen C4F8 Ne Halocarbon C318 Neon C4H8 O2 Butene-1 Oxygen CBrF3 Xe Halocarbon 13B1 Xenon CCl2F2 Halocarbon 12 Following symbols indicate toxic gas (allowable concentration 200

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Round Type Hydraulic Cylinder

Yes A90V Grommet IC circuit 100 V or less No Yes No Yes No 100 V, 200 V Relay PLC 200 V or less 12 V Connector 2-wire 24 V IC circuit 24 V or less PLC Terminal conduit 100 V, 200 V Yes Relay PLC DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

Vacuum Pad

100 200 200 0 0 0 0 30 10 104 or less 104 or less Volume resistivity (7cm) > 5 > > > > > > > Heat aging > > > > > > > > > > Weather resistance 5 > > > > 5 > > > > Ozone resistance Gas permeability resistance > > /5 /5 /5 /5 > > > > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight

Modular Type Lubricators Series AL

268 B 85 124 166 200 200 274 292 B 162 196 196 270 288 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 512 Lubricator Series AL10 to AL60 Dimensions Semi-standard specifications: 1000 cm3 tank AC-A 106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact

Modular Type Lubricator Series AL

gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195 195 269 287 Metal bowl with drain cock B 85 124 166 200 200 274 292 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 53 Lubricator AL10 to 60 Dimensions Optional specifications: 1000cm3 tank 106 90 106 E Port size Bracket (option) 70 66 3.2 13 11 C P IN OUT H OUT With float switch B 210 Specifications

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

Special Specifications:

HA AT Series AME, AMF ID 250 CA A AME AMF AMG AFF Body size AM 150 250 350 450 550 650 850 Misc. 14-20-59 Series AFF-CA, AM-CA Dimensions Series AFF, AM, AMD, AMH, AMG Size: AFF2B to 37B, AM150 to 650 (B) (B) (B) (C) (A) (A) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Electro-Pneumatic Valve NVEP/NVEF Series

Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.