IR1000/2000/3000

) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa)

Compact Cylinder with Lock Series CLQ

65 70 75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

7

60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

LEF-OM002xx

60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62

High Power Cylinder Series RHC

High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63, 80, 100 Bore sizes 50, 63, 80 and 100 added to Series RHC and newly released! Suitable for high speed use or heavy loads at low speed.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

Vacuum

/min (3.54 sctm) 632/min (2.23 sclm) -84kPa (-24 I 0.7MPa (100 0.2-0.5MPa (30-70 psi) 0.4MPa (60 psi) Max suction flow rate (ANR) Air consumption (ANR) Max. vacuum pressure NZLl12-c Slandard supply pressure 5 50.C (40 122.F) Air Evacuation Time Exhaust Characteristics ) Flow Characteristics Supply pressure: 0 4MPa (58psi) ,100 (29 0) -90 (26 1) Understanding the graph above The time necessary

Vacuum

/min (3.54 sctm) 632/min (2.23 sclm) -84kPa (-24 I 0.7MPa (100 0.2-0.5MPa (30-70 psi) 0.4MPa (60 psi) Max suction flow rate (ANR) Air consumption (ANR) Max. vacuum pressure NZLl12-c Slandard supply pressure 5 50.C (40 122.F) Air Evacuation Time Exhaust Characteristics Flow Characteristics Supply pressure: 0 4MPa (58psi) ,100 (29 0) -90 (26 1) Understanding the graph above The time necessary

PA3000/5000/PAX1000

per minute 1 60 = x x Reference life cycles Cycles per minute 1 8 (daily operating time) Service life 1 60 = 1 8 50,000,000 50 x x 2083 days = 27 Process Pump Common Precautions 5 Be sure to read before handling.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

T

Min. bending radius (mm) 75 60 48 36 24 25 13 100 15 20 30 60 75 Caution Operating temperature 20 to +60C (Water: 0 to 40C) (No freezing) 1. Applicable for general industrial water. Please consult with SMC if using other kinds of fluid. Surge pressure must be under the max. operating pressure.

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

OMR0032

(30 10-3) = 2000 [pulses/s) Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] [Calculation example: Target position 2] Travel distance: 6 (30 10-6) = 200 [pulses] (in the reverse direction) Travel speed: 60 (30 10-3) = 2000 [pulses/s] Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] 61 - Step Data setting example Thrust Load mass

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing