Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Rotary Table

M5. 2 180 Standard tyoe Number of auto switches 3 90 4 180 2pcs.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: 8 Port

2/3 Port Solenoid Valve for Chemicals

(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.

Pressure Gauge Guide

Micro-switch Rated Voltage AL Load resistant 30 VDC 125 VAC 250 VAC 0.01 to 0.5 A 0.01 to 0.3 A 0.01 to 0.2 A Rated voltage Load Operating current range How to Order GP46 10 01 M C L2 X201 Option Pressure gauge with switch Nil X201 Lead wire length 3 m Symbol Specifications Option Size Nil M With M5 (Female thread) Symbol Specifications Note 1) X3 (Wetted parts stainless steel) specification

VK3000

Port size (P, A and B port) Rated voltage M5 01 M5 x 0.8 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 8 R1, R2: M5 Option 24 VDC 12 VDC Nil None With bracket (Not assembled) 240 VAC, 50/60 Hz For other rated voltages, please consult with SMC. F Option Part No. Description Part no.

VQD1000

4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.

Digital Pressure Switch

Problem Problem possible causes Investigation method Countermeasures Check that the power supply voltage is within the range 12 to 24 VDC 10%. Incorrect power supply Supply the correct voltage of 12 to 24 VDC 10%. Check the wiring to the power supply.

Digital Pressure Switch

Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.

Pressure Sensor

kPa 101 kPa For low pressure 0 to 101 kPa 0 101 kPa -10.1 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OME0004-G Dimensions PSE53-M5 PSE53R06 R07 Model No.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

A 24 V100 M5 thread 8 deep, with or without insert depending on base material. SY 32 SYJ A' VK Coding stud.

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Manifold Specifications

+ COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note 1) Value at manifold base mounted, single operating Note 2) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

HRX-OM-Q026

Flow switch Blue (DC COM) Brown (24 VDC) Terminal No. 14 Brown (24 VDC) 6 Terminal No. Flow switch 5 Terminal No. Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No.