125

30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated: VEX3320 DIN terminal (D) Caution How to Use DIN Terminal Connector Refer to page 1739.

PFA/PFW

1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 15 Series PFW Digital Flow Switch for Water For Water Dimensions (mm)/ Separate Type 1in = 25.4mm Scale: 70% PFW504-m (N) PFW520-m (N) Sensor Unit 56 L 60 42 6 17 1.6 48.2 34 54 44 2-Piping port size 4-4.5 40 50 (43.5) 2 1 42 4 3 4 Connector pin numbers Pin name Pin No. 2-3.4 43 DC (+) 1 NC 2 DC () 3 Flow

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 49 36 10 10 39.5 48.5 133 51 55 58.5 17-5-110 15 Series LQ1 High Purity Fluoropolymer Fittings Union: LQ1U Metric sizes Applicable tubing O.D.

Compact Guide Cylinder

[mm] Bore size Allowable interval 12 (10 x 2) 15 16 (12 x 2) 15 20 (16 x 2) 15 25 (20 x 2) 10 32 (25 x 2) 5 40 (32 x 2) 0 50 (40 x 2) 0 63 (45 x 2) 0 80 (56 x 2) 0 100 (71 x 2) 0 Allowable interval Allowable interval View View 11 Prior to Use Auto Switch Connection and Example Sink Input Specifications Source Input Specifications 3-wire, NPN 3-wire, PNP Input Input Brown Brown Black Black

Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

Series MXP Precision Air Slide Table

MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-

Modular F.R.L. Unit

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

3 Position Cylinder Series RZQ

U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.

CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Clamp Cylinder with Lock Series CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

CRB1/Size: 10, 15, 20, 30

(MPa) 0.2 0.15 Speed range(1) (sec/90) 0.03 to 0.3 0.04 to 0.3 0.0003 Allowable kinetic energy (J) 0.02 0.0012 0.0033 Size 10 Size 15 Double vane 15 Shaft load Allowable radial load 30 15 25 10 (N) Allowable thrust load 25 10 20 Bearing Bearing Order Made Port position On the body side or in the axial direction P.1.1-20 to 1.2-28 Port size (Body side, Axial direction) M3 X 0.5 M5 X 0.8 Shaft

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 123 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1H20 Dimensions/LJ1H202 (X40) Scale: 25% Dimensions other than those shown in the drawing are the same as standard. 110 130 20 2-8H10 depth 10 4-M8 x 1.25 For work piece mounting 4-14 4-9 Mounting plate (4-M8 x 1.25) 9 15 35 Work piece mounting dimensions 92 20 138 95 10 15.5 105 135 42 This

End Lock Cylinder Series CBJ2

10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in

MLGP

For detailed specifications, refer to page 9-15-1.

Series KV2 Fittings

15 23 40 42 16 23 36 TBD 75 37 35 44 68 43 51 75 81 97 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/100 100/100 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/100 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

MLGP

Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.