V

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

Sine Cylinder Series REC

13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

Sine Cylinder Series REC

13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

NCA1

-93 NCA325-13-Q6311 5008-131 10 Tie Rod Nut Carbon steel NCA150-13-Q6308 5008-93 11 Retaining Ring Carbon steel NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 12 Rod Seal Retainer Resin NCA150-31-Q6308 13* Cushion Seal NBR Available only as an Assembled Item.

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

Pin Clamp Cylinders

8.5 20 18 13 27 4 4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 13.5 19.5 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 11 7.5 20 15 10.5 25 4

SFOD-OMT0009CN

DRIVE ON No.Bit No. 11 OUT2 DRIVE ON 31 OUT3 12 OUT4 32 OUT5 (1) RESET ON OFF (2) 13 OUT6 33 OUT7 14 OUT8 ON (BUSY1BUSY4OR) Bit No. BUSY 34 (OUT9) 3) ON (AREA1AREA4AND) Bit No.

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

ML2B

Reed switch D-X 20Data 10-13-17

ML2B

Reed switch D-X 20Data 10-13-17

MXH

Select a bore size in accordance with How to Select on page 8-2-12 to 8-2-13. 2. Displacement may increase after an impact load has been applied.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operating Environment/Storage Environment Warning Warning 1. Do not use in the following environment as it will lead to a breakdown.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 600 4 Port Direct Operated Poppet Solenoid

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA20 MSUA20-S, SE Scale: 50% 8-M5 x 0.8 depth 10 C Top ports/MSUA20-SE 78 A port B port 14 2-M5 x 0.8 B 48 59 38 15.5 42 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 ( A , B , C ) 4 2-6.6 through 3-R2 3-R2 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 168 181 198 220 243 269 9 11 13 34 40