MGP

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 175st Over 75st to 175st 25st or less Over 25st to 75st Over 175st Over 75st to 175st Over 25st to 75st 98 25st or less 22 22 9.5 21 15 15 84.5 118 140 16 13.5 33.5 55.5 0 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 7 27 49 0 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59

MGG

100 35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22

Speed Controller with Indicator

/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2 AS131FS1-U10/32-

SX

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

JA/JAH/JB/JS

13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5

JA/JAH/JB/JS

6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5

SV

EX300-T001 General purpose Each T unit has 32 control points.

ZP

L D 10 39.5 23.4 12.5 10 5 10 10 2 13 16 40 23.9 13 10.5 E2 2 M5 x 0.8 20 25 46.5 29.3 15.5 12.5 B5 N S U F GN GS 30 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 20 25 B8 (Rotating angle) 04 06 08 ZP R F 10 to 32 46.5 29.3 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 M Width across flats H F G

SY

or less 26 or less 2 position single 18 or less 18 or less 22 or less 2 position double 32 or less 32 or less 38 or less 3 position 19 or less SY7000 With indicator light/surge voltage suppressor Response time ms (at 0.5MPa) Type of actuation Without indicator light/ surge voltage suppressor R, U types S, Z types 33 or less 38 or less 2 position single 27 or less 28 or less 30 or less 2

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Description Material 25 32 40 20 Aluminum alloy Clear hard anodized Rod cover q Aluminum alloy Clear hard anodized Piston seal NBR PPD-25-19 PPD-32 PPD-40 PPD-20 Tube cover !

Electric Actuators

BIT 2 5 Program designation Pro-no. bit2 5 <1> BIT 3 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 Stp-no. bit3 7 20 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)

Table of Contents

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

MNB

6 12 8.5 22 17 1/8 30 10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37

MNB

6 12 8.5 22 17 1/8 30 10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37

CL

32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32 40 40 52 52 22 27 27 32 41 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78

MY1

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

Tamper Proof and Flat Head Screw

and AS131F-U10/32.

MNB

101 91 14 52.5 14 16.5 65 63 to 500 9 27 50 1/4 35 27 11 120.5 46.5 20 40 14 12 100 52 120 104.5 15.5 58.5 18 19 77 75 to 600 9 32 63 1/4 35 27 11 134.5 56.5 20 45 14 12 115 62 135 119.5 16.5 68 18 23 92 90 to 600 9 32 80 1/4 40 32 13 169 72 25 45 20 16 126 63 153 150 19 81 22 33 100 102 to 750 12 37 100 1/4 40 41 16 189 89 30 55 20 16 150 75 178 170 19 96 26 37.5 120 116 to 750 14 37 Bore

CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

MXQ

19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.