VK300

3 73 65 2 54 46 1 35 27 L1 L2 L3 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 4-5-6 7 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK300 Type 21 Manifold Body Ported (Top ported) n1 = Number of VK300 VV3K3-21Stations Grommet: G DIN terminal: D Grommet: G DIN terminal: D Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 V100 SY 300

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184 11 225 217 203 12 244 236 222 13 263 255 241 14 282 274 260 15 301 293 279 16 320 312 298 17 339 331 317 18 358 350 336 19 377 369 355 20 396 388 374 L1 L2 L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (non-locking) 2-

VKF300

2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184 11 225 217 203 12 244 236 222 13 263 255 241 14 282 274 260 15 301 293 279 16 320 312 298 17 339 331 317 18 358 350 336 19 377 369 355 20 396 388 374 L1 L2 L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (non-locking) 2-

HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P

CNS

CL Y-12 Y-14 Y-16 125 140 160 25 32 25 +0.084 0 +0.3 +0.1 0.1 0.3 46 100 M30 x 1.5 27 42 E1 NX NZ +0.3 +0.1 0.1 0.3 28 36 28 +0.084 0 48 105 M30 x 1.5 30 47 CL1 +0.3 +0.1 0.1 0.3 32 40 32 +0.100 0 55 110 M36 x 1.5 34 46 MLGC U1 L1 CNG RR1 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P

Slider Type Ball Screw Drive/11-LEFS Series

. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

Modular Type Lubricators Series AL

274 292 B 162 196 196 270 288 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 512 Lubricator Series AL10 to AL60 Dimensions Semi-standard specifications: 1000 cm3 tank AC-A 106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact point: 1a, 1b AW AG

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

CY1F

17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

VCL

VA VCL40: 19/16 VA LVA VCL40: 13 VA Holding LVH Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

NCA1

-93 NCA325-13-Q6311 5008-131 10 Tie Rod Nut Carbon steel NCA150-13-Q6308 5008-93 11 Retaining Ring Carbon steel NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 12 Rod Seal Retainer Resin NCA150-31-Q6308 13* Cushion Seal NBR Available only as an Assembled Item.

Pin Clamp Cylinder Series CKQ/CLKQ

A 13 48 B CKQ CLKQ B B B B B B A 14 49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

SFOD-OMT0009CN

DRIVE ON No.Bit No. 11 OUT2 DRIVE ON 31 OUT3 12 OUT4 32 OUT5 (1) RESET ON OFF (2) 13 OUT6 33 OUT7 14 OUT8 ON (BUSY1BUSY4OR) Bit No. BUSY 34 (OUT9) 3) ON (AREA1AREA4AND) Bit No.

CHKD/CHKG

15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

Booster Regulator/Air Tank

PVQ VY1 VBA VBAT VBA VBAT AP100 Booster Regulator/VBA Series Air Tank/VBAT Series 1007 Booster Regulator VBA Series Reduced by 13 dB (A) compared with the current model compared with the current model Reduced by 13 dB (A) Improved service life that of the current model Doubled that of the current model Doubled Reduced noise Floating piston structure Grease retaining groove Metal noise