Stopper Cylinder

11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

MXU

30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

S Couplers

Rc 1/4 43.4 36.1 17 -03F 1/4 Rc 3/8 6.9 26.4 18.9 44.4 40.2 19 -04F Rc 1/2 48.6 69.7 T KKA6P-03F Rc 3/8 48.7 84.1 24 -04F 1/2 Rc 1/2 10.0 54.2 20.4 52.9 79.7 -06F Rc 3/4 30 54.6 123.8 KKA7P-04F Rc 1/2 67.7 217.1 32 -06F 3/4 Rc 3/4 13.5 99.6 27.6 69.4 196.8 L2 H -10F Rc 1 72.4 325.9 L1 KKA8P-06F Rc 3/4 41 82.0 420.5 -10F 1 Rc 1 17.5 168.3 35.6 85.0 391.3 -12F Rc 1 1/4 50 87.3 552.8 KKA9P-

AC Servo Motor Driver (Pulse input type/Positioning type)

List of Parameters for each Mode .16 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 17 4.4 Torque control mode . 17 4.5 Positioning mode . 18 5.

Low Profile Guide Type

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62

Environment

. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

PSxx-OMR0001CN

No.PS-OMR0001CN-J // ISA3 1 2 7 8 14 15 2 (ISA3) 15 () 16 (2 ) 16 17 20 26 26 29 34 38 3 41 42 44 44 44 45 45 4 46 46 46 () 58 59 60 5 61 62 62 -1No.PS-OMR0001CN-J 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

JXCx-OMT0028CN

0255 ID1 18 (ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit code 3 (1-***) () Address

Series CE1

39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5 79.5 83 D-A79W 2 10.5 14.5 36.5 41.5 39 45 51.5 59.5 83.5 86.5 90 D-F7BA, F7lW, F7lF, J79W 8.5 17.5 21.5 43.5 48.5 46 41.5 48 56 80 83 86.5 D-F7lWV 5 14 18 40 45 42.5 39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5

Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

3 Port Solenoid Valve Metal Seal Series VZ200 1

/17 or less 0.085 20 17/17 or less 0.155 VZ Response time (ms) (AC/DC) (2) Weight (kg) (3) VS Note 1) Minimum operating frequency: as per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value for grommet (Sub-plate weight: 0.03 kg) Note 4) Note 1) and Note 2) are with controlled clean air.

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

1.63

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for