Clean Gas Filter

Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

SYA3000/5000/7000

5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order One-touch fitting (Inch size) A, B port size Thread type Thread piping Rc Nil Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 M5 x 0.8 One-touch fitting for N NPT SYA3000 1 8 1 4 Except for M5 1 4" One-touch fitting for NPTF T 5 32" One-touch

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

3 Port Air Operated Valve

) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 34.5 37.2 Cable type (TT) 52-SY5140 (R) -TT-02 Max.10 L 120.8 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8

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M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

connector (20 pins) PH: Flat cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specification ... ... ... ... ... ...

3 Port Solenoid Valve Metal Seal Series VZ200 1

) DIN terminal: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5

VZA2000

side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-7 8 Series VZA4000 Dimensions: Base Mounted 3 position closed center: VZA4341--01 02 Pilot port (B side) Body side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Courtesy of Steven Engineering, Inc

Modular Type Filter Regulator Series AW

With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure gauge (with limit indicator) With set nut (for panel mount) Applicable model AW10 to 40 AW10 to 40 AW30, 40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size Body size Symbol Port size Note 4) 10 20 30 40 M5 01 02 03 04 06 Note 4) M5 1/8 1/4 3/8 1/2 3/4 G

Smooth Cylinder/Low Speed Cylinder

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (L/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (L/min (ANR)) 260 390

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

A (2) Model T D1 H1 L4 (1) Applicable tubing O.D. d (g) Weight H2 D2 L1 L2 L3 M AS121F-M5-06W2 AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5

Secondary Batteries

22 SDPC For positive pressure 90 ZSE50 02 M F SDPC 22 For compound pressure Series compatible with secondary batteries 90 Material restriction Option Nil None Piping specifications Panel mount R 1/4 (M5 with female screw), Piping in backward direction 02 E Input/output specifications 22 62* NPN open collector 2 output PNP open collector 2 output Panel mount + Front protection cover *Optional

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or