25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

d9 20 25 32 40 42 16 28 43.4 143 164 168 189 193 214 42 20 28 48 150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 6-5-12.

CQS

CX CZ L L1 CD hole H10 Rod d9 B 17 17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 12 16 20 25 5, 10 B + Stroke CL + Stroke A + Stroke Double clevis bracket material: Carbon steel For details about the rod end nut and accessory

Fluoropolymer Piping Equipment

29 20 29 14 28 26 17 26 54 44 54 39 23 39 5.8 LQ1T5A-R5 1/2" 3/4" 3/4" 29 26 54 39 9 LQ1T5A-R6 3/8" 3/4" 3/4" 20 17 44 23 5.8 LQ1T5A-R7 1/2" 1/2" 3/4" 24 24 39.5 21 21 36 42 52.5 57.5 28 28 49 9 LQ1T5A-R8 3/8" 3/8" 3/4" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 5.8 Note) Products marked are produced upon receipt of order.

Floating Joint

59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8, 1/4 47.9 28.5 53.6 38 55.2 48.9 30 1/4, 3/8 56.8 31.1 62.5 41 64.1 51.9 40 1/4, 3/8, 1/2 64.8 31.1 70.5 41 72.1 51.9 Glossary of Terms Specific Product Precautions 42 JSXM Series Dimensions DS: DIN terminal

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

JA/JAH/JB/JS

70 80 88 96 116 116 16 20 24 30 39 48 98.5 123 155 187 213 220 53 65 56 67.5 78 78 18 24 24 38 42 49 1.09 2.03 4.1 6.4 10 10.5 28 35 38 45 55 55 1.5 1.5 1.5 1.5 1.5 1.5 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000

JA/JAH/JB/JS

35 38 45 55 55 1.5 1.5 1.5 1.5 1.5 1.5 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000 55000 20Data Option: Heavy Load Type Hydraulic: Up to 7 MPa JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187

Free Mount Cylinder

7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46 50 52 Z 51

F

17 4.6 6 12 KQR06-12 12.8 42 20 17 13.1/13.1 5/16 9.5(3/8) KQR09-11 16 45.5 25 18.5 6 8 10 KQR08-10 15.2 41 20 18.5 26.1/18 5/16 12.7(1/2) KQR09-13 16 42.5 21 18.5 6 8 12 KQR08-12 15.2 42 20 18.5 26.1/18 3/8 12.7(1/2) KQR11-13 48 44.5 22.5 21 7 10 12 KQR10-12 17 42 20 21 41.5/32.8 10 16 KQR10-16 21 50.5 26.5 21 41.5/(29.5) 12 16 KQR12-16 21 50.5 26.5 22 58.3/(46.1) Note: ( ) Dimensions are

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

ZP

Form w 1 Material e Vacuum inlet r Connection B M5 x 0.8 thread 10 13 38 22 2.5 M5 x 0.8 5 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 10 13 B5 C2 Construction p. 117 38 22 2.5 N S U F GN GS Adapter Assembly p. 123 N4 N6 U4 U6 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 20 25 B8 ZP Y U B6 M6 x 1 6 42 24 3.5 M8 x 1.25 8 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 Dimensions

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore NN NB NA MM KA H GB GA FZ FY FX FT FC FB F CB CA BB BA Z A S 10 9.5 12.5 M4 X 0.7 4.2 28 5 8 42 20 33 2.3 M10 X 1.0 5.5 17.5 8 14 17 12 15 74 15 46 16 9.5 12.5 M5 X 0.8 5.2 28 5 8 42 20 33 2.3 M12 X 1.0 5.5 19 8 20 20 18 18 75 15 47 Double Clevis (D) CJ2KD Bore size Stroke Material: Iron Part No.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CA2

to 500 30 27 22 44 16 32 10 12 42 100 15 8 M8 x 1.25 71 60 80 60 9.0 50 up to 600 20 to 600 35 32 27 52 20 40 10 12 50 110 17 11 M8 x 1.25 81 70 90 70 9.0 63 up to 600 20 to 600 35 32 27 64 20 40 10 15 59 130 17 11 M10 x 1.25 101 86 105 85 11.5 80 up to 750 20 to 750 40 37 32 78 25 52 14 18 76 160 21 13 M12 x 1.75 119 102 130 102 13.5 100 up to 750 20 to 750 40 37 41 92 30 52 14 18 92 180

15

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10

Air Cylinder

Rod Trunnion (U) with Pivot Bracket TS Bracket mounting range B TH TT 4 x TF Z TW TY TX TV +0.10 0 TE Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z 20 38 10 5.5 25 28 3.2 35.8 42 16 28 46 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 51 32 54 10 6.6 35 40 4.5 49.4 48 22 28 51 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 62 50 79 20 9 50 60 6 72.4 64 36 36 71 63 96 20 11

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 12 16 20 25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64