M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T21-ST1 2 2-06 LQ1-2N06 LQ1-2B06 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 LQ1T21-ST2 2 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 2-06 LQ1-2N06 LQ1-2B06 LQ1T21-ST3 2 2-06 LQ1-2N06 LQ1-2B06 Applicable body size 2 LQ1T21-ST4 2 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 LQ1T31-ST1 3 3-10 LQ1-3N10 LQ1-3B10 Applicable body

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Lubricator

60 21 30 27 22 5.4 8.4 60 2.3 28 AL30-D 1/4, 3/8 53 104.3 38.1 26.5 30 80 26.5 41 35 25 6.5 13 71 2.3 32 AL40-D 1/4, 3/8, 1/2 70 136.1 44 35.5 38.4 110 35.5 50 52 30 8.5 12.5 88 2.3 39 AL40-06-D 3/4 75 138.1 44 35.5 38.4 110 35.5 50 52 34 8.5 12.5 88 2.3 43 AL50-D 3/4, 1 90 209.1 48 45 110 45 70 66 40.5 11 13 113 3.2 52.5 AL60-D 1 95 223.1 48 45 110 45 70 66 40.5 11 13 113 3.2 52.5 Semi-standard

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

HRX-OM-T004

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS090

HRX-OM-R028

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRSH

3

/521 20A (Port size 06) 40A (Port size 14) p16 p10 PF3W711/511-;06 p9 p8 p7 p6 p5 p4 p3 p2 p1 p0 p14 (at 100 L /min) p12 Accuracy [% F.S.]

HRX-OM-Q033

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRSH

HRX-OM-S010

(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRS100

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

84 25 21 98 30 24 111 46 36 132 50 41 200 74 60 230 74 60 271 86 70 JIS Symbol 1 4 1 2 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction/Parts/Dimensions ANA1-01 to 06 Sound absorbing Case material (PFV ) End plate Hexagonal flats ANA1-06: PP How to

Compact 5-Port Solenoid Valve

) p. 21 JJ5SY1-10PH JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Connector Entry Direction Adjustable (10 pins) p. 21 JJ5SY1-10PHC JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Compact Type (10 pins) p. 21 JJ5SY1-10S JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: EX250 Series p. 77

1

CJ1 Series MB Series MB1 Width across flats MA CJP MM Width across flats MA ZZ MM ML MH MI Bore size (mm) MK MA ZZ MM ML MH MI MK Bore size (mm) MA 32 40 50 63 80 100 175 10 18 44 24 10 21 32 40 50 63 80 100 175 10 18 44 24 10 21 CJ2 M I 183 14 20 48 32 12 27 183 14 20 48 32 12 27 205 18 21 53 38 15 32 205 18 21 53 38 15 32 ML + Adjustment CM2 Stroke MK 205 18 21 53 38 15 32 205 18 21 53

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

PC11 MO1 Analog monitor 1 offset Used to set the offset voltage of the analog monitor 1 (MO1) output. 0 mV -999 to 999 5 21 5. PARAMETERS No.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

VFM300

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

VZM400

VH Push button (Extended) VZM450-01-32R/B/G/Y Panel mounting hole VHS JIS Symbol (Pilot exhaust port) 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 1.7 mm O.T. 2-3.5 mounting hole 6.5 mm T.T.