MHZ 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock
Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.
mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .
Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper
30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14
l h + l DZZ1 + l + Stroke -X 20Data Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C CL D E EA F FA FD FT FX FY FZ G GA 125 140 160 16 50 47 145 145 205 1/2 3/8 115 120 36 90 63 35 14 19 14 190 100 230 155 Up to 1000 16 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 180 Up to 1000 18.5 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 215 Up to 1200
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.
16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17
500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22
34 9 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side D side 40 (53) D side (2n-Rc1/8) 17 2 82.5 34 14 154 (single) 82.5 4n-Rc3/8, 1/2 175.5 (double) 154 (single) 59 62 94 175.5 (double) 180.5
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.
7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30
-32 16 64 16 32 32 50, 63 83 M16 x 1.5 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 KJ10D 10 43 28 14 20 13 14 32 M10 x 1.25 KJ12D 12 50 32 16 22 13 16 40 M12 x 1.25 KJ16D 16 64 42 21 28 15 26 50, 63 M16 x 1.5 80, 100 M20 x 1.5 KJ20D 20 77 50 25 33 15