1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Sectional view Standard size Minimum position Seal End face Insert bushing Body Tubing Reducer type 17-5-56 15 Series LVD High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below.

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8 10.4 56

XL

66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions. 544 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 AS TMH ASD AS AS-FE KE AS-FG AS-FG AS-FP AS-FM Meter-in type M5 type U10/32 type AS-D AS-T AS3311FG

Speed Controller with One-touch Fitting

Tubing O.D. 18 g 56 g 6 6 AS221F-02-06 AS221F-02-06A 1/4 1/4 KE 12 12 AS421F-04-12 AS421F-04-12A 1/2 1/2 AS-FG AS-FP AS-FM Face seal adopted for threading AS-D Improved installability (Reduced tool-tightening after hand-tightening) AS-T Face seal Face seal Sealant ASP At hand-tightening After tool-tightening At hand-tightening After tool-tightening ASN AQ ASV AK VCHC ASR ASQ Number of rotations

Solid State Auto Switches

Weight (g) D-F79F Auto switch model 0.5 m (Nil) 13 3 m (L) Lead wire length 56 5 m (Z) 90 Diagnostic Output Operation The diagnostic output signal is output within the red display area (where indicator light is Red), and it is not output within the proper operating range (where indicator light is Green).

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

Stroke Reading Cylinder and Counter

LEFT RIGHT 35.5 A : B : C : D : t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

Tie-rod Type Hydraulic Cylinder

Hs G 1/2 (applicable cable O.D. 6.8 to 9.6) D-G39/K39 D-A3 56 34 B 36 A 49 Auto switch G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs D-A44 56 B 36 Auto switch 49 A Approx.

MY2

D-F9NW, F9NWV DC (+) Brown OUT Black Main switch circuit Auto Switch Weights Unit: g D-F9NW(V) D-F9PW(V) D-F9BW(V) Model DC () Blue 0.5 7 7 7 3 34 34 32 Lead wire length (m) 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l DC () Blue Slotted set screw Indicator light 2 2.7 D-F9BW, F9BWV 22 2.8 OUT (+) Brown 2.6 4 Main

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MRQ Main circuit of switch Main circuit of switch OUT Black DWeight 20DC () Blue (g) D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch model 0.5 7 7 7 D-F9PW, D-F9PWV Lead wire length (m) 3 34 34 32 DC (+) Brown 5 56 56 52 Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW, D-F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main circuit of switch Most sensitive

REC

Cylinder Series REC Table q Relation between cylinder size and a max. stroke (cm) Graph q Absorbed energy curve Mounting bracket Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 MK/MK2 REC40 Operating Symbol REC32 pressure RSQ/RSG Mounting bracket symbol and figure REC MPa REC25 30 Load weight M (kg) 25 32 40 20 RSH REC20 20 Front flange: F Rear flange: G 39 50 56

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1