3 Port Solenoid Valve SYJ300/500/700 Series Body ported type M3 0.5 0.9 (0.05) 31 29 SYJ322 N.O. SYJ314 N.C. 52 (Without sub-plate 31) 50 (Without sub-plate 29) Base mounted type (With sub-plate) M5 0.8 1.8 (0.1) SYJ324 N.O.
G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat
Note 2) They are not applicable in case the thread type is N or F.
When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
[F 7] Setting of fine adjustment of display value 0% 1 s Mounting and Installation Manual [F 8] Setting of auto-preset Display to show the unit specification OFF [F 9] Setting of power saving mode 1 s Installation Mounting Mount the optional bracket and panel mount adapter to the Pressure switch.
(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
=F3x L3 M= WexL =5xVaxWxL 3 F3 L3
Moment (Nm) Moment (Nm) Moment (Nm) Load mass (kg) M1 = F1 x L1 Piston speed V (mm/s) ML1C/M2, M3 M2 = F2 x L2 M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load mass, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load mass.
Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.
Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.
) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E