E-P HYREG ® Series VY1 1 WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC
) 3 (R) 14.5 14.5 2 x 1/8 2 x 4.6 mounting hole 44 25.4 17 * 0.5 MPa supply F .O.F .* 15 N T.T. 90 Key can be removed at the on and off positions.
base: In common for all types of VV5K3 models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Base mounted Caution Body ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.
1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,
OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.
Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6(
Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.
Contact P/A regarding the specifications for PSI unit and F .
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
case of M3 Dimensions with broken lines stand for a locking knob type.
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.
How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard
M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)