5 Port Solenoid Valve, Series VQC

/16") N11 (3/8") (NPT, NPTF, G) Rc 1/4 Rc 3/8 Rc 1/4 (bottom ported) Rc 3/4 (NPT, NPTF, G) (NPT, NPTF, G) IV Based-Mounted Type Plug-in Unit Series VQC1000/2000 How to Order Manifolds B VV5QC 1 1 08 C6 FD1 F P T Kit / / VV5QC 1 1 08 C6 B SDQ S Kit Options Series 1 2 VQC1000 VQC2000 Input block COM (Indicate for I/O unit only) Manifold type Input block type (Indicate for I/O

25

OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

TABLE OF CONTENTS

9/16 Housing A Stop) 1-2WNO G-1/32 We Require full description In A.C.

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

LEC-OM02904

PC05 **COP2 C-2 0h 0 0 0 0 1 0 1: PC06 *COP3 C-3 0h No.PC01 0 0 0 01 [rev] 10.1 [rev] 20.01 [rev] 30.001[rev] 01 [rev] 10.1 [rev] 20.01 [rev] 30.001[rev] B1 MR Configurator2 TM PC07 ZSP (ZSP) (ZSP)20r/min(3.5(2)(b)) 50 r/min 0 10 PC08 0 PC09 MOD1 1 0h 1(M01)(5.3.3) 0 0 0 +8V/400V 1MO1 1(MO1) 8V/ 0 (8V/) 8V/ 1 (8V/) +8V/ +8V/ 2 (8V/) 3 (8V/) 8V/ 4 (8V/) 5 6 (10V/100pulse) 8V/ 10V/

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

ZSE40/ISE40

to 50C, 2% F .S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R 1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc 1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

PSxx-OMU0005CN

HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018

With Factory Installed

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

VQC

/16") N11 (3/8") (NPT, NPTF, G) Rc 1/4 Rc 3/8 Rc 1/4 (bottom ported) Rc 3/4 (NPT, NPTF, G) (NPT, NPTF, G) Features 4 Series VQC1000/2000 Base-Mounted Type Plug-in Unit How to Order Manifolds B VV5QC 1 1 08 C6 FD1 F P T Kit / / VV5QC 1 1 08 C6 B SDQ S Kit Options Series 1 2 VQC1000 VQC2000 Input block COM (Indicate for I/O unit only) Manifold type Input block type (Indicate for

PF2A/PF2W

g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

10g : Rubber bumper 2g : Double clevis 92g 25 12 16 20 Option g g g g oz oz oz oz 1.5 6 12 3 0.05 0.21 0.42 0.11 Male thread Rod end thread Note 2) 1 4 8 2 0.04 0.14 0.28 0.07 Nut Total 201g 0 -2 -3 1 -0.07 -0.11 0.04 0 Single rod Rubber bumper Note 3) 0 -2 -2 -1 -0.07 -0.07 -0.04 0 Double rod 55 159 181 65 5.61 6.38 2.29 1.94 Standard Foot (including bolt) 53 153 172 61 5.40 6.07 2.15

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.