VCS

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

LVQ

/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Pilot port Rc 1/8 (NPT 1/8) A B A B SMC SMC LVQ -S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 -S LVQ3 -S LVQ4 -S LVQ5 -S LVQ6 -S 2 1 25.5 46 31.5 58 33.6 81 12 77 21.8 37 5 7 15 31.3 21 25.3 64 2 1 23.5 47 29.5 59 45.4 99 16.5 95 32 50 6 7 20 37.2 25 31.2 82 2 1 23.5 47 29.5 59

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

CJ5-S

port in axial location (R) BB H BA S + Stroke 0 0.3 0 0.3 CY Z + Stroke MQQ M RHC Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA

CJ5-S

) 258-9200-www.stevenengineering.com RHC Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

NAAMS Standards Compliant

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 [mm] [mm] Model NAAMS code A B C D E F G H I J Model NAAMS code A B C D E F G H I J CKZ-63A031 ACA031M 125.0 110.0 95.0 80.0 65.0 CKZ-63A032 ACA032M 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ-63A033 ACA033M 185.0 170.0

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal

240

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F L L Distance L [mm] Model LEPS6 LEPS10 Stroke [mm] 25 50 25 50 Distance L [mm] 53.0 77.0 59.5 82.0 LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement

Environment

Nil Ends tapped/ Body bottom tapped 2 L Foot F Rod flange 2 3 G Head flange 2 4 Applicable Stroke Table : Standard For auto switches, refer to page 507. -X5 is not added to an actuator model with a controller/driver part number suffix.

VK3000

ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2 port: