Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Hydraulic

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

Air Cylinder

+ l + Stroke h + l 8 8 8 8 IJ e JH f f JW l ZZ + 2 ( l + Stroke) S + Stroke h + l l + Stroke h + l + Stroke (mm) Bore size Stroke range A AL B1 C D E F GA H1 I J K KA MM NA P S Standard Long stroke 20 Up to 200 201 to 1500 18 15.5 13 14 8 12 2 12 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 77 25 Up to 300 301 to 1500 22 19.5 17 16.5 10 14 2 12 6 31 M5 x 0.8 depth

JIS Standard Hydraulic Cylinder

stroke MA A K F GA GB H + Q + l 2 x Rc P R J MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release 10 f l NA T B TX TY0.3 TY0.3 NB SS + Q + l + 1/2 stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Stroke range (mm) Bore size (mm) J e RR B C F GA GB M NA NB P R S T SS TD TT TX TY TZ l f Q B-rod C-rod B-rod C-rod 1 32 M10 x 1.25 25 to 1800

CL

1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40

Tie-rod Type Hydraulic Cylinder

TDe8 TR W W D E TY d MA a M C NB B A K F NA H S + Stroke M 0 0.5 TX ZZ + Stroke TZ With rod boot e 10 l f h + l Z + l + 1/2 stroke ZZ + l + Stroke (mm) Bore size (mm) A B C a E D d F G GA GB J K M MA MM NA NB Tde8 P R S T 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 0.032 0.059 0.032 0.059 0.032 0.059 0.040 0.073 0.050 0.089

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

NCA1

/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8 BORE

Air Cylinder NCA1 Series

3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

CL

How to Order CL Number of auto switches L 100 200 F JN CL1 CL1 Without auto switch 2 pcs. 3 pcs. 1 pc. n pcs.

CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

MHZ2/MHZJ2

MHZ 2-10S MHZ 2-10C 12 Pressure 0.7MPa Pressure 0.7MPa 20 10 0.6 MPa 0.6MPa Gripping force N Gripping force N 8 15 MHZ2/Standard MHZJ2/With dust cover 0.5MPa 0.5MPa 6 10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 10 20 30 40 50 60 0 0 10 20 30 40 50 Gripping point L mm Gripping point L mm F F F F MHZ 2-16S MHZ 2-16C 60 Pressure 0.7MPa 40 1N : approx. 0.102kgf 1MPa : approx. 10.2kgf/cm 1N : approx

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

CNG

f 8 l ML1C Z + l + Stroke ZZ + l + Stroke DWith rod boot -X 20Data Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 52.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Nil F 0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06