XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

A

0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) Base mounted Body ported With Bracket Air operated valve type SYJA3 2-M3-F 1 2 JIS Symbol SYJA312 4 SYJA322 4 Pilot Pressure Range Caution (A) 2 (A) 2 For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

VQC

) Nil K Note 1) E Light/Surge voltage suppressor 3-position pressure center Manual override F Dual 3-port valve (N.C. + N.C.)

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 2(A)3(R) 1(P)2(A) VM/VR 11 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-04F-01S VHKl-06F-M5 VHKl-04F-M5 18 41 23.8 16.5 3.5 15.8 1 8 VH 21 50 11 23 53 13 M5 2.0 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 1 8 1 4 3 8 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-01S VHKl-06F-02S VHKl-06F-03S 1.2

I

) B Backlit LCD 01 Direct Piping 1/8 T1 NPTF 1/8 P I P I N G S P E C I F I C AT I O N S S W I T C H S P E C I F I C AT I O N S 01 Direct Piping PT 1/8 T1 NPTF 1/8 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

across flats 24 28 4 x M4 x 0.7 H 3 x M3 x 0.5 H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Model Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model ZPX40HB-01-B 8 ZPX63HB-01-B10 M8 x 1.25 M10 x 1.5 40 41 28 43 20.5 47 69 13 63 65 46 68 31.5 58 80 21.5 32 43 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX50HB-01-B 8 ZPX80HB-01-B10 M8 x 1.25 M10 x 1.5 50 52 36 54 24 50.5

Series PF2W Digital Flow Switch For Water

410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

KR

Female thread portion connected with fitting must be grounded, otherwise static electricity will remain in the fittings and tubes. 15-3-21 3 Series KA Male Branch Tee: KAT H (width across flats) Soft nylon Effective area (mm 2) Connection thread M thread Uni thread Applicable tubing O.D.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

4 q o !3 @1 @0 !1 !0 !2 r MHZ w u MHF e MHL !5 MHR y !9 u t MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR3 !4 !3 MHS q !1 @0 @1 MHC w o MHT e i MHY !5 MHW MRHQ r !7 !6 t !8 !0 !2 i !9 y u Misc.

Compact Cylinder

C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J E I 4-N through T D M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

3 !4 r t y u i !5 !6 No.

asilltr

1Vt 1 % 2% 3 4 v3 3l t h a 1 % z 2y, 3 Series NCQT D Aulo-swiich capable Switches (see page 16) Type of Aulo Switch (Rail Mounted) Wiiilut Auto witch : Female Rod (Stid.)

VZ100/300/500

Description Solenoid assembly Material Note Epoxy Stainless steel DXT170-AVZ110 t 1(P) (SUP port) 1(P) (EXH port) Epoxy Stainless steel Solenoid assembly DXT170-EVZ120 y u Common with Series VZ 00 3 5 3(R) (EXH port) 3(R) (SUP port) 13 x 11 x 1 NBR O-ring 4-6-6 7 3 Port Solenoid Valve Rubber Seal, Body Ported Series VZ100 Body Ported Grommet (G), (H) VZ10-M5(-F) G H (Mounting hole) V100 SY